Abstract
The electroless Ni-P under bump metallization (UBM) is experimentally studied, which shows to be amorphous and has a composition of Ni85P15. The crystallization of electroless Ni-P was observed during solder reflow and the crystallization product was Ni3P. The kinetics of crystallization was found to be diffusion controlled and the conservation of P occurred between electroless Ni-P and Ni3P. A grain-boundary diffusion of the Ni or an interstitial diffusion of the P through the Ni3P layer was proposed based on the kinetic data and microstructural observation.
| Original language | English |
|---|---|
| Pages (from-to) | 8456-8463 |
| Journal | Journal of Applied Physics |
| Volume | 85 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 15 Jun 1999 |
| Externally published | Yes |