Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning properties

Yi-Ruei Lin; K. Y. Lai; Hsin-Ping Wang; Jr-Hau He

doi:10.1039/c0nr00402b

Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning properties

Yi-Ruei Lin
, K. Y. Lai
, Hsin-Ping Wang
, Jr-Hau He^*

^*Corresponding author for this work

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

73 Citations (Scopus)

Abstract

Slope-tunable Si nanorod arrays (NRAs) were fabricated with colloidal lithography and reactive ion etching (RIE). Sharpened NRAs fabricated by increasing the SF₆/O₂ flow ratio during RIE exhibit enhanced antireflection (AR) and hydrophobic properties, which are attributed to the smooth gradient in the effective refractive index of NRAs, and the enlarged water/air interface of the water drops in the NRA layers, respectively. Enhanced AR characteristics via modifying the slope of NRAs are accompanied by broad-band working ranges, omnidirectionality, and polarization insensitivity. Detailed experimental and theoretical analysis of slope-tunable NRAs should benefit the development of various self-cleaning optoelectronic devices with efficient light management.

Original language	English
Pages (from-to)	2765-2768
Journal	Nanoscale
Volume	2
Issue number	12
Online published	8 Oct 2010
DOIs	https://doi.org/10.1039/c0nr00402b
Publication status	Published - 1 Dec 2010
Externally published	Yes

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title = "Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning properties",

abstract = "Slope-tunable Si nanorod arrays (NRAs) were fabricated with colloidal lithography and reactive ion etching (RIE). Sharpened NRAs fabricated by increasing the SF6/O2 flow ratio during RIE exhibit enhanced antireflection (AR) and hydrophobic properties, which are attributed to the smooth gradient in the effective refractive index of NRAs, and the enlarged water/air interface of the water drops in the NRA layers, respectively. Enhanced AR characteristics via modifying the slope of NRAs are accompanied by broad-band working ranges, omnidirectionality, and polarization insensitivity. Detailed experimental and theoretical analysis of slope-tunable NRAs should benefit the development of various self-cleaning optoelectronic devices with efficient light management.",

author = "Yi-Ruei Lin and Lai, \{K. Y.\} and Hsin-Ping Wang and Jr-Hau He",

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doi = "10.1039/c0nr00402b",

language = "English",

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TY - JOUR

T1 - Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning properties

AU - Lin, Yi-Ruei

AU - Lai, K. Y.

AU - Wang, Hsin-Ping

AU - He, Jr-Hau

PY - 2010/12/1

Y1 - 2010/12/1

N2 - Slope-tunable Si nanorod arrays (NRAs) were fabricated with colloidal lithography and reactive ion etching (RIE). Sharpened NRAs fabricated by increasing the SF6/O2 flow ratio during RIE exhibit enhanced antireflection (AR) and hydrophobic properties, which are attributed to the smooth gradient in the effective refractive index of NRAs, and the enlarged water/air interface of the water drops in the NRA layers, respectively. Enhanced AR characteristics via modifying the slope of NRAs are accompanied by broad-band working ranges, omnidirectionality, and polarization insensitivity. Detailed experimental and theoretical analysis of slope-tunable NRAs should benefit the development of various self-cleaning optoelectronic devices with efficient light management.

AB - Slope-tunable Si nanorod arrays (NRAs) were fabricated with colloidal lithography and reactive ion etching (RIE). Sharpened NRAs fabricated by increasing the SF6/O2 flow ratio during RIE exhibit enhanced antireflection (AR) and hydrophobic properties, which are attributed to the smooth gradient in the effective refractive index of NRAs, and the enlarged water/air interface of the water drops in the NRA layers, respectively. Enhanced AR characteristics via modifying the slope of NRAs are accompanied by broad-band working ranges, omnidirectionality, and polarization insensitivity. Detailed experimental and theoretical analysis of slope-tunable NRAs should benefit the development of various self-cleaning optoelectronic devices with efficient light management.

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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-78649884662&origin=recordpage

U2 - 10.1039/c0nr00402b

DO - 10.1039/c0nr00402b

M3 - RGC 21 - Publication in refereed journal

C2 - 20936223

SN - 2040-3364

VL - 2

SP - 2765

EP - 2768

JO - Nanoscale

JF - Nanoscale

IS - 12

ER -

Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning properties

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