Sliding mode control design for a rapid thermal processing system

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

12 Scopus Citations
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Original languageEnglish
Pages (from-to)76-85
Journal / PublicationChemical Engineering Science
Publication statusPublished - 2 Apr 2016


A sliding mode control strategy is developed for temperature control of a rapid thermal processing (RTP) system to enhance temperature accuracy and uniformity when heating in this work. Temperature dynamics of the RTP is nonlinear and infinite-dimensional while order of the controller should be finite due to implementation limitations. Developing a nonlinear low-order controller for the system is important if accurate and uniform control of the temperature is required. This work addresses this issue by developing a sliding mode controller based on the dominant modes of the system. The schemes are applied to a RTP system and excellent performances are achieved.

Research Area(s)

  • Distributed parameter system, Galerkin's method, Rapid thermal processing, Sliding mode control