@inproceedings{8a2536973d8b45dea3ce38df84af8590,
title = "Site controlled nanotube shell etching for interlayer motion based NEMS",
abstract = "We present a new method for local control of shell engineering in multiwalled carbon nanotubes (MWNTs) using the Joule-heating induced electric breakdown technique. By modulating the heat dissipation along a nanotube, we can confine its thinning and shell breakdown to occur within localized regions of peak temperatures. The modulation is achieved by using suitably nanomachined heat sinks with different degrees of thermal coupling at different parts of a current-carrying nanotube. Being compatible with CMOS unit processes, this method is expected to be a powerful tool to create batch fabricated nanobearings with sophisticated architectures for use in nanoelectromechanical systems (NEMS). ",
keywords = "Carbon nanotubes, Heat sink, NEMS, Shell engineering",
author = "A. Subramanian and Choi, {T. -Y.} and Dong, {L. X.} and Shou, {K. Y.} and J. Tharian and U. Sennhauser and D. Poulikakos and Nelson, {B. J.}",
year = "2007",
month = jun,
doi = "10.1109/SENSOR.2007.4300309",
language = "English",
isbn = "1-4244-0841-5",
series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
publisher = "IEEE",
pages = "1031--1034",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
address = "United States",
note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",
}