Single nanotube array based nano encoders

Lixin Dong; Arunkumar Subramanian; Bradley J. Nelson; Yu Sun

doi:10.1109/IROS.2005.1545139

Single nanotube array based nano encoders

Lixin Dong
, Arunkumar Subramanian
, Bradley J. Nelson
, Yu Sun

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

1 Citation (Scopus)

Abstract

Linear encoders for nanoscale position sensing based on single carbon nanotube (CNT) arrays are presented. Vertically aligned single multi-walled carbon nanotubes (MWNTs) are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. Electron beam lithography is used to define 50-150 nm nickel catalyst dots at precise locations on a silicon chip. Precise control of the position, density and alignment of the tubes has been achieved. Aligned nanotube arrays with spacing varying from 250 nm to 25 μm are realized. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. With this scanning anode and the single MWNT array, a nano encoder is investigated experimentally. Vertical position is detected by the change in emission current, whereas the horizontal position of the scanning anode is sensed from the emission distribution. A resolution of 98.3 nm in the vertical direction and 38.0 nm (best: 12.9 nm) in the lateral direction has been achieved.

Original language	English
Title of host publication	IROS 2005 - IEEE IRS/RSJ International Conference on Intelligent Robots and Systems
Publisher	IEEE
Pages	1178-1183
DOIs	https://doi.org/10.1109/IROS.2005.1545139
Publication status	Published - Aug 2005
Externally published	Yes
Event	IEEE IRS/RSJ International Conference on Intelligent Robots and Systems, IROS 2005 - Edmonton, Canada Duration: 2 Aug 2005 → 6 Aug 2005 https://ieeexplore.ieee.org/xpl/conhome/10375/proceeding

Publication series

Name	2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS

Conference

Conference	IEEE IRS/RSJ International Conference on Intelligent Robots and Systems, IROS 2005
Place	Canada
City	Edmonton
Period	2/08/05 → 6/08/05
Internet address	https://ieeexplore.ieee.org/xpl/conhome/10375/proceeding

Research Keywords

Carbon nanotube array
Field emission
Nano encoder
Nanorobotic manipulator
Scanning anode

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10.1109/IROS.2005.1545139

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Cite this

@inproceedings{58c5ca32480d4db08397731735d7f228,

title = "Single nanotube array based nano encoders",

abstract = "Linear encoders for nanoscale position sensing based on single carbon nanotube (CNT) arrays are presented. Vertically aligned single multi-walled carbon nanotubes (MWNTs) are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. Electron beam lithography is used to define 50-150 nm nickel catalyst dots at precise locations on a silicon chip. Precise control of the position, density and alignment of the tubes has been achieved. Aligned nanotube arrays with spacing varying from 250 nm to 25 μm are realized. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. With this scanning anode and the single MWNT array, a nano encoder is investigated experimentally. Vertical position is detected by the change in emission current, whereas the horizontal position of the scanning anode is sensed from the emission distribution. A resolution of 98.3 nm in the vertical direction and 38.0 nm (best: 12.9 nm) in the lateral direction has been achieved. ",

keywords = "Carbon nanotube array, Field emission, Nano encoder, Nanorobotic manipulator, Scanning anode",

author = "Lixin Dong and Arunkumar Subramanian and Nelson, \{Bradley J.\} and Yu Sun",

year = "2005",

month = aug,

doi = "10.1109/IROS.2005.1545139",

language = "English",

series = "2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS",

publisher = "IEEE",

pages = "1178--1183",

booktitle = "IROS 2005 - IEEE IRS/RSJ International Conference on Intelligent Robots and Systems",

address = "United States",

note = "IEEE IRS/RSJ International Conference on Intelligent Robots and Systems, IROS 2005 ; Conference date: 02-08-2005 Through 06-08-2005",

url = "https://ieeexplore.ieee.org/xpl/conhome/10375/proceeding",

}

Dong, L, Subramanian, A, Nelson, BJ & Sun, Y 2005, Single nanotube array based nano encoders. in IROS 2005 - IEEE IRS/RSJ International Conference on Intelligent Robots and Systems., 1545139, 2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS, IEEE, pp. 1178-1183, IEEE IRS/RSJ International Conference on Intelligent Robots and Systems, IROS 2005, Edmonton, Alberta, Canada, 2/08/05. https://doi.org/10.1109/IROS.2005.1545139

Single nanotube array based nano encoders. / Dong, Lixin; Subramanian, Arunkumar; Nelson, Bradley J. et al.
IROS 2005 - IEEE IRS/RSJ International Conference on Intelligent Robots and Systems. IEEE, 2005. p. 1178-1183 1545139 (2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Single nanotube array based nano encoders

AU - Dong, Lixin

AU - Subramanian, Arunkumar

AU - Nelson, Bradley J.

AU - Sun, Yu

PY - 2005/8

Y1 - 2005/8

N2 - Linear encoders for nanoscale position sensing based on single carbon nanotube (CNT) arrays are presented. Vertically aligned single multi-walled carbon nanotubes (MWNTs) are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. Electron beam lithography is used to define 50-150 nm nickel catalyst dots at precise locations on a silicon chip. Precise control of the position, density and alignment of the tubes has been achieved. Aligned nanotube arrays with spacing varying from 250 nm to 25 μm are realized. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. With this scanning anode and the single MWNT array, a nano encoder is investigated experimentally. Vertical position is detected by the change in emission current, whereas the horizontal position of the scanning anode is sensed from the emission distribution. A resolution of 98.3 nm in the vertical direction and 38.0 nm (best: 12.9 nm) in the lateral direction has been achieved.

AB - Linear encoders for nanoscale position sensing based on single carbon nanotube (CNT) arrays are presented. Vertically aligned single multi-walled carbon nanotubes (MWNTs) are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. Electron beam lithography is used to define 50-150 nm nickel catalyst dots at precise locations on a silicon chip. Precise control of the position, density and alignment of the tubes has been achieved. Aligned nanotube arrays with spacing varying from 250 nm to 25 μm are realized. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. With this scanning anode and the single MWNT array, a nano encoder is investigated experimentally. Vertical position is detected by the change in emission current, whereas the horizontal position of the scanning anode is sensed from the emission distribution. A resolution of 98.3 nm in the vertical direction and 38.0 nm (best: 12.9 nm) in the lateral direction has been achieved.

KW - Carbon nanotube array

KW - Field emission

KW - Nano encoder

KW - Nanorobotic manipulator

KW - Scanning anode

UR - https://www.scopus.com/pages/publications/79957976124

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-79957976124&origin=recordpage

U2 - 10.1109/IROS.2005.1545139

DO - 10.1109/IROS.2005.1545139

M3 - RGC 32 - Refereed conference paper (with host publication)

T3 - 2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS

SP - 1178

EP - 1183

BT - IROS 2005 - IEEE IRS/RSJ International Conference on Intelligent Robots and Systems

PB - IEEE

T2 - IEEE IRS/RSJ International Conference on Intelligent Robots and Systems, IROS 2005

Y2 - 2 August 2005 through 6 August 2005

ER -

Single nanotube array based nano encoders

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RSJ/SICE Award for IROS2005 Best Paper Nomination Finalist

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Single nanotube array based nano encoders

Abstract

Publication series

Conference

Research Keywords

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Prizes

RSJ/SICE Award for IROS2005 Best Paper Nomination Finalist

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