Silicon carbide nanoparticles for advanced materials produced in radio frequency modulated glow discharges

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • G. Viera
  • S. N. Sharma
  • J. Costa
  • J. L. Andújar
  • E. Bertran

Detail(s)

Original languageEnglish
Pages (from-to)665-668
Journal / PublicationVacuum
Volume48
Issue number7-9
Publication statusPublished - Sep 1997
Externally publishedYes

Abstract

Nanometric powder of silicon carbide has been produced in a radiofrequency square wave-modulated glow discharge of SiH4 and CH4 gases. The transient behavior observed in the power absorbed during the discharge has been related to the various steps of the formation of particles. At the transmission electron microscope, two populations of particles were found: around 70 and 300 nm. Electron diffraction patterns showed that the particles were amorphous although the short-range order was similar to that of β-SiC micrometric powder. The atomic concentrations of Si, C and H were determined by elemental analysis. The chemical composition was determined by X-ray photoelectron spectroscopy. The polymeric character of the powder was evident from the presence of CH2 and CH3 species as indicated by RAMAN and FTIR spectroscopies. © 1997 Elsevier Science Ltd. All rights reserved.

Citation Format(s)

Silicon carbide nanoparticles for advanced materials produced in radio frequency modulated glow discharges. / Viera, G.; Sharma, S. N.; Costa, J.; Zhang, R. Q.; Andújar, J. L.; Bertran, E.

In: Vacuum, Vol. 48, No. 7-9, 09.1997, p. 665-668.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review