Silicon carbide nanoparticles for advanced materials produced in radio frequency modulated glow discharges

G. Viera; S. N. Sharma; J. Costa; R. Q. Zhang; J. L. Andújar; E. Bertran

doi:10.1016/s0042-207x(97)00055-9

Silicon carbide nanoparticles for advanced materials produced in radio frequency modulated glow discharges

G. Viera
, S. N. Sharma
, J. Costa
, R. Q. Zhang
, J. L. Andújar
, E. Bertran

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

7 Citations (Scopus)

Abstract

Nanometric powder of silicon carbide has been produced in a radiofrequency square wave-modulated glow discharge of SiH₄ and CH₄ gases. The transient behavior observed in the power absorbed during the discharge has been related to the various steps of the formation of particles. At the transmission electron microscope, two populations of particles were found: around 70 and 300 nm. Electron diffraction patterns showed that the particles were amorphous although the short-range order was similar to that of β-SiC micrometric powder. The atomic concentrations of Si, C and H were determined by elemental analysis. The chemical composition was determined by X-ray photoelectron spectroscopy. The polymeric character of the powder was evident from the presence of CH₂ and CH₃ species as indicated by RAMAN and FTIR spectroscopies. © 1997 Elsevier Science Ltd. All rights reserved.

Original language	English
Pages (from-to)	665-668
Journal	Vacuum
Volume	48
Issue number	7-9
DOIs	https://doi.org/10.1016/s0042-207x(97)00055-9
Publication status	Published - Sept 1997
Externally published	Yes

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@article{acf5d93bc2fd48b5b2afc1f52f3004c9,

title = "Silicon carbide nanoparticles for advanced materials produced in radio frequency modulated glow discharges",

abstract = "Nanometric powder of silicon carbide has been produced in a radiofrequency square wave-modulated glow discharge of SiH4 and CH4 gases. The transient behavior observed in the power absorbed during the discharge has been related to the various steps of the formation of particles. At the transmission electron microscope, two populations of particles were found: around 70 and 300 nm. Electron diffraction patterns showed that the particles were amorphous although the short-range order was similar to that of β-SiC micrometric powder. The atomic concentrations of Si, C and H were determined by elemental analysis. The chemical composition was determined by X-ray photoelectron spectroscopy. The polymeric character of the powder was evident from the presence of CH2 and CH3 species as indicated by RAMAN and FTIR spectroscopies. {\textcopyright} 1997 Elsevier Science Ltd. All rights reserved.",

author = "G. Viera and Sharma, \{S. N.\} and J. Costa and Zhang, \{R. Q.\} and And{\'u}jar, \{J. L.\} and E. Bertran",

year = "1997",

month = sep,

doi = "10.1016/s0042-207x(97)00055-9",

language = "English",

volume = "48",

pages = "665--668",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Ltd.",

number = "7-9",

}

TY - JOUR

T1 - Silicon carbide nanoparticles for advanced materials produced in radio frequency modulated glow discharges

AU - Viera, G.

AU - Sharma, S. N.

AU - Costa, J.

AU - Zhang, R. Q.

AU - Andújar, J. L.

AU - Bertran, E.

PY - 1997/9

Y1 - 1997/9

N2 - Nanometric powder of silicon carbide has been produced in a radiofrequency square wave-modulated glow discharge of SiH4 and CH4 gases. The transient behavior observed in the power absorbed during the discharge has been related to the various steps of the formation of particles. At the transmission electron microscope, two populations of particles were found: around 70 and 300 nm. Electron diffraction patterns showed that the particles were amorphous although the short-range order was similar to that of β-SiC micrometric powder. The atomic concentrations of Si, C and H were determined by elemental analysis. The chemical composition was determined by X-ray photoelectron spectroscopy. The polymeric character of the powder was evident from the presence of CH2 and CH3 species as indicated by RAMAN and FTIR spectroscopies. © 1997 Elsevier Science Ltd. All rights reserved.

AB - Nanometric powder of silicon carbide has been produced in a radiofrequency square wave-modulated glow discharge of SiH4 and CH4 gases. The transient behavior observed in the power absorbed during the discharge has been related to the various steps of the formation of particles. At the transmission electron microscope, two populations of particles were found: around 70 and 300 nm. Electron diffraction patterns showed that the particles were amorphous although the short-range order was similar to that of β-SiC micrometric powder. The atomic concentrations of Si, C and H were determined by elemental analysis. The chemical composition was determined by X-ray photoelectron spectroscopy. The polymeric character of the powder was evident from the presence of CH2 and CH3 species as indicated by RAMAN and FTIR spectroscopies. © 1997 Elsevier Science Ltd. All rights reserved.

UR - https://www.scopus.com/pages/publications/0031220278

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0031220278&origin=recordpage

U2 - 10.1016/s0042-207x(97)00055-9

DO - 10.1016/s0042-207x(97)00055-9

M3 - RGC 21 - Publication in refereed journal

SN - 0042-207X

VL - 48

SP - 665

EP - 668

JO - Vacuum

JF - Vacuum

IS - 7-9

ER -

Silicon carbide nanoparticles for advanced materials produced in radio frequency modulated glow discharges

Abstract

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