SILICIDE CONTACT AND GATE IN MICROELECTRONIC DEVICES.

K. N. Tu

doi:10.1007/978-1-4684-4847-4_5

SILICIDE CONTACT AND GATE IN MICROELECTRONIC DEVICES.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	Methods and Materials in Microelectronic Technology.
Publisher	Plenum Press
Pages	83-97
ISBN (Print)	0306418037, 9780306418037
DOIs	https://doi.org/10.1007/978-1-4684-4847-4_5
Publication status	Published - 1984
Externally published	Yes

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Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

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10.1007/978-1-4684-4847-4_5

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@inproceedings{eeab998cd45643d38459b61cdb880df6,

title = "SILICIDE CONTACT AND GATE IN MICROELECTRONIC DEVICES.",

author = "Tu, {K. N.}",

note = "Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].",

year = "1984",

doi = "10.1007/978-1-4684-4847-4_5",

language = "English",

isbn = "0306418037",

pages = "83--97",

booktitle = "Methods and Materials in Microelectronic Technology.",

publisher = "Plenum Press",

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AU - Tu, K. N.

N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

PY - 1984

Y1 - 1984

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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0021655965&origin=recordpage

U2 - 10.1007/978-1-4684-4847-4_5

DO - 10.1007/978-1-4684-4847-4_5

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0306418037

SN - 9780306418037

SP - 83

EP - 97

BT - Methods and Materials in Microelectronic Technology.

PB - Plenum Press

ER -

SILICIDE CONTACT AND GATE IN MICROELECTRONIC DEVICES.

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