β-SIC nanorods synthesized by hot filament chemical vapor deposition

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • X. T. Zhou
  • N. Wang
  • H. L. Lai
  • H. Y. Peng
  • I. Bello
  • N. B. Wong
  • S. T. Lee

Detail(s)

Original languageEnglish
Pages (from-to)3942-3944
Journal / PublicationApplied Physics Letters
Volume74
Issue number26
Publication statusPublished - 28 Jun 1999

Abstract

A one-step procedure has been developed to grow β-SiC nanorods from a solid carbon and silicon source on a Si substrate by hot filament chemical vapor deposition. This process is catalyzed by metallic particles which come from impurities in the solid source which is a plate made by pressing a mixture graphite and silicon powders at 150°C. Hydrogen was introduced into the reaction chamber to react with the solid plate to produce hydrocarbon and hydrosilicon radicals which presumably reacted to form SiC nanorods. The nanorods consisted of a crystalline β-SiC core with an amorphous silicon oxide shell layer and grew along the [100] direction. The nanorods were 10-30 nm in diameter and less than 1 μm in length. © 1999 American Institute of Physics.

Citation Format(s)

β-SIC nanorods synthesized by hot filament chemical vapor deposition. / Zhou, X. T.; Wang, N.; Lai, H. L. et al.
In: Applied Physics Letters, Vol. 74, No. 26, 28.06.1999, p. 3942-3944.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review