Si nanowires sheathed with thin diamondlike carbon films

T. Qiu; X. L. Wu; L. W. Yang; P. N. Shen; Z. Y. Zhang; G. G. Siu; Paul K. Chu

doi:10.1116/1.2207155

Si nanowires sheathed with thin diamondlike carbon films

T. Qiu
, X. L. Wu
, L. W. Yang
, P. N. Shen
, Z. Y. Zhang
, G. G. Siu
, Paul K. Chu

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

1 Citation (Scopus)

Abstract

Via electroless metal deposition and industrial plasma technology, we have successfully synthesized unique composite silicon nanowire structures with diamondlike carbon (DLC) sheaths acting as inorganic passivation layers. We have also discussed their growth mechanism in terms of a self-organization process. The thickness of the DLC sheaths were quantified with Raman spectroscopy. The Raman analytical result is in good agreement with direct microstructure observations. © 2006 American Vacuum Society.

Original language	English
Pages (from-to)	1702-1704
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	24
Issue number	4
DOIs	https://doi.org/10.1116/1.2207155
Publication status	Published - Jul 2006

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title = "Si nanowires sheathed with thin diamondlike carbon films",

abstract = "Via electroless metal deposition and industrial plasma technology, we have successfully synthesized unique composite silicon nanowire structures with diamondlike carbon (DLC) sheaths acting as inorganic passivation layers. We have also discussed their growth mechanism in terms of a self-organization process. The thickness of the DLC sheaths were quantified with Raman spectroscopy. The Raman analytical result is in good agreement with direct microstructure observations. {\textcopyright} 2006 American Vacuum Society.",

author = "T. Qiu and Wu, \{X. L.\} and Yang, \{L. W.\} and Shen, \{P. N.\} and Zhang, \{Z. Y.\} and Siu, \{G. G.\} and Chu, \{Paul K.\}",

year = "2006",

month = jul,

doi = "10.1116/1.2207155",

language = "English",

volume = "24",

pages = "1702--1704",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "0734-211X",

publisher = "American Institute of Physics",

number = "4",

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TY - JOUR

T1 - Si nanowires sheathed with thin diamondlike carbon films

AU - Qiu, T.

AU - Wu, X. L.

AU - Yang, L. W.

AU - Shen, P. N.

AU - Zhang, Z. Y.

AU - Siu, G. G.

AU - Chu, Paul K.

PY - 2006/7

Y1 - 2006/7

N2 - Via electroless metal deposition and industrial plasma technology, we have successfully synthesized unique composite silicon nanowire structures with diamondlike carbon (DLC) sheaths acting as inorganic passivation layers. We have also discussed their growth mechanism in terms of a self-organization process. The thickness of the DLC sheaths were quantified with Raman spectroscopy. The Raman analytical result is in good agreement with direct microstructure observations. © 2006 American Vacuum Society.

AB - Via electroless metal deposition and industrial plasma technology, we have successfully synthesized unique composite silicon nanowire structures with diamondlike carbon (DLC) sheaths acting as inorganic passivation layers. We have also discussed their growth mechanism in terms of a self-organization process. The thickness of the DLC sheaths were quantified with Raman spectroscopy. The Raman analytical result is in good agreement with direct microstructure observations. © 2006 American Vacuum Society.

UR - https://www.scopus.com/pages/publications/33746603617

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-33746603617&origin=recordpage

U2 - 10.1116/1.2207155

DO - 10.1116/1.2207155

M3 - RGC 21 - Publication in refereed journal

SN - 0734-211X

VL - 24

SP - 1702

EP - 1704

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 4

ER -

Si nanowires sheathed with thin diamondlike carbon films

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