Si nanowires sheathed with thin diamondlike carbon films

T. Qiu; X. L. Wu; L. W. Yang; P. N. Shen; Z. Y. Zhang; G. G. Siu; Paul K. Chu

doi:10.1116/1.2207155

Author(s)

T. Qiu
X. L. Wu
L. W. Yang
P. N. Shen
Z. Y. Zhang
G. G. Siu

Detail(s)

Original language	English
Pages (from-to)	1702-1704
Journal / Publication	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	24
Issue number	4
Publication status	Published - Jul 2006

Link(s)

DOI	DOI https://doi.org/10.1116/1.2207155 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-33746603617&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(54791980-3fa2-465e-bd94-b96023eb8ba3).html

Abstract

Via electroless metal deposition and industrial plasma technology, we have successfully synthesized unique composite silicon nanowire structures with diamondlike carbon (DLC) sheaths acting as inorganic passivation layers. We have also discussed their growth mechanism in terms of a self-organization process. The thickness of the DLC sheaths were quantified with Raman spectroscopy. The Raman analytical result is in good agreement with direct microstructure observations. © 2006 American Vacuum Society.

Citation Format(s)

[ RIS ] [ BibTeX ]

Si nanowires sheathed with thin diamondlike carbon films. / Qiu, T.; Wu, X. L.; Yang, L. W. et al.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 24, No. 4, 07.2006, p. 1702-1704.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Qiu, T, Wu, XL, Yang, LW, Shen, PN, Zhang, ZY, Siu, GG & Chu, PK 2006, 'Si nanowires sheathed with thin diamondlike carbon films', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 24, no. 4, pp. 1702-1704. https://doi.org/10.1116/1.2207155

Qiu, T., Wu, X. L., Yang, L. W., Shen, P. N., Zhang, Z. Y., Siu, G. G., & Chu, P. K. (2006). Si nanowires sheathed with thin diamondlike carbon films. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 24(4), 1702-1704. https://doi.org/10.1116/1.2207155

Qiu T, Wu XL, Yang LW, Shen PN, Zhang ZY, Siu GG et al. Si nanowires sheathed with thin diamondlike carbon films. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2006 Jul;24(4):1702-1704. doi: 10.1116/1.2207155

Qiu, T. ; Wu, X. L. ; Yang, L. W. et al. / Si nanowires sheathed with thin diamondlike carbon films. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2006 ; Vol. 24, No. 4. pp. 1702-1704.