Si DAMAGE INDUCED BY DRY ETCHING.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Original language	English
Pages (from-to)	289-290
Journal	Electrochemical Society Extended Abstracts
Volume	82-2
Publication status	Published - 1982
Externally published	Yes
Event	Extended Abstracts, Fall Meeting - Electrochemical Society 1982. - Detroit, ML, United States Duration: 17 Oct 1982 → 21 Oct 1982

Other Access Options

@article{a259eb4e4fa6436c8f9bb76d8133d650,

title = "Si DAMAGE INDUCED BY DRY ETCHING.",

author = "S. Pang and Rathman, \{D. D.\} and Silversmith, \{D. J.\} and Mountain, \{R. W.\} and DeGraff, \{P. D.\}",

year = "1982",

language = "English",

volume = "82-2",

pages = "289--290",

journal = "Electrochemical Society Extended Abstracts",

issn = "0160-4619",

note = "Extended Abstracts, Fall Meeting - Electrochemical Society 1982. ; Conference date: 17-10-1982 Through 21-10-1982",

}

TY - JOUR

T1 - Si DAMAGE INDUCED BY DRY ETCHING.

AU - Pang, S.

AU - Rathman, D. D.

AU - Silversmith, D. J.

AU - Mountain, R. W.

AU - DeGraff, P. D.

PY - 1982

Y1 - 1982

UR - https://www.scopus.com/pages/publications/0020269639

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0020269639&origin=recordpage

M3 - RGC 21 - Publication in refereed journal

SN - 0160-4619

VL - 82-2

SP - 289

EP - 290

JO - Electrochemical Society Extended Abstracts

JF - Electrochemical Society Extended Abstracts

T2 - Extended Abstracts, Fall Meeting - Electrochemical Society 1982.

Y2 - 17 October 1982 through 21 October 1982

ER -