Sensors and actuators on non-planar substrates

Wen J. Li; John D. Mai; Chih-Ming Ho

doi:10.1016/S0924-4247(98)00258-1

Sensors and actuators on non-planar substrates

Wen J. Li, John D. Mai, Chih-Ming Ho

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

32 Citations (Scopus)

Abstract

The integration of MEMS sensors and actuators onto macro mechanical parts is a critical technology necessary for the potential realization of intelligent mechanical structures. The current planar fabrication methods offered by the MEMS/IC industry restrict the possibility of integrating micro devices onto contoured (non-planar) mechanical structures. We have developed a lithographic technique to directly fabricate micron-sized sensing and actuation devices onto a cylindrical surface. This novel technology encompasses the development of flexible masks, photoresist spraying technique, and customized alignment systems. Results indicate that line resolution of

Original language	English
Pages (from-to)	80-88
Journal	Sensors and Actuators, A: Physical
Volume	73
Issue number	1-2
DOIs	https://doi.org/10.1016/S0924-4247(98)00258-1
Publication status	Published - 9 Mar 1999
Externally published	Yes
Event	Proceedings of the 1998 11th IEEE International Workshop On Micro Electro Mechanical Systems, MEMS 1998 - Heidelberg, Germany Duration: 25 Jan 1998 → 29 Jan 1998

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AU - Mai, John D.

AU - Ho, Chih-Ming

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N2 - The integration of MEMS sensors and actuators onto macro mechanical parts is a critical technology necessary for the potential realization of intelligent mechanical structures. The current planar fabrication methods offered by the MEMS/IC industry restrict the possibility of integrating micro devices onto contoured (non-planar) mechanical structures. We have developed a lithographic technique to directly fabricate micron-sized sensing and actuation devices onto a cylindrical surface. This novel technology encompasses the development of flexible masks, photoresist spraying technique, and customized alignment systems. Results indicate that line resolution of

AB - The integration of MEMS sensors and actuators onto macro mechanical parts is a critical technology necessary for the potential realization of intelligent mechanical structures. The current planar fabrication methods offered by the MEMS/IC industry restrict the possibility of integrating micro devices onto contoured (non-planar) mechanical structures. We have developed a lithographic technique to directly fabricate micron-sized sensing and actuation devices onto a cylindrical surface. This novel technology encompasses the development of flexible masks, photoresist spraying technique, and customized alignment systems. Results indicate that line resolution of

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DO - 10.1016/S0924-4247(98)00258-1

M3 - RGC 21 - Publication in refereed journal

SN - 0924-4247

VL - 73

SP - 80

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JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

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T2 - Proceedings of the 1998 11th IEEE International Workshop On Micro Electro Mechanical Systems, MEMS 1998

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ER -

Sensors and actuators on non-planar substrates

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