Self-Sustaining Square-Extensional Mode Resonator Oscillator for Mass Sensing in Liquid

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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Detail(s)

Original languageEnglish
Title of host publicationProceedings - EUROSENSORS 2018
PublisherMultidisciplinary Digital Publishing Institute (MDPI)
Number of pages4
Volume2
ISBN (print)2504-3900
Publication statusPublished - Sept 2018

Conference

Title32nd Eurosensors Conference (EUROSENSORS 2018)
PlaceAustria
CityGraz
Period9 - 12 September 2018

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Publisher's Copyright Statement
  • This full text is made available under CC-BY 4.0. https://creativecommons.org/licenses/by/4.0/
Permanent Link https://scholars.cityu.edu.hk/en/publications/publication(7760c0c9-d60e-4504-bf85-cf8e34d4225f).html

Abstract

We present a 5.41 MHz square-extensional (SE) mode resonator in closed-loop oscillation for resonant mass sensing in the liquid phase. The resonator has been fabricated in piezoelectric thin film aluminum nitride (AlN) on silicon (Si). The strain profile of the SE mode allows for higher electromechanical coupling efficiency using piezoelectric transduction to lower the motional resistance (Rm) given the expected low quality factors (Q) in liquid (136 compared to 942 in air). By locking the device into self-sustained oscillation, the minimum detectable frequency shift is reduced from 3680 ppm (open-loop in water) to 8.76 ppm (closed-loop in air).

Research Area(s)

  • MEMS resonator, MEMS oscillator, thin-film piezoelectric-on-silicon (TPoS), liquid phase sensing

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Publication fingerprints text

100
Resonator Engineering
100
Oscillator Engineering
66
Closed Loop Engineering
66
Piezoelectric Engineering
66
Piezoelectricity Material Science
33
Thin Films Engineering
33
Liquid Phase Engineering
33
Nitride Engineering
33
Q Factor Engineering
33
Open Loop Engineering
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Citation Format(s)

[ RIS ] [ BibTeX ]
Self-Sustaining Square-Extensional Mode Resonator Oscillator for Mass Sensing in Liquid. / Begum, Habiba; Ali, Abid; Lee, Joshua En-Yuan.
Proceedings - EUROSENSORS 2018. Vol. 2 Multidisciplinary Digital Publishing Institute (MDPI), 2018. 976.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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