Self-neutralized ion implantation into insulators
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Author(s)
Detail(s)
Original language | English |
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Pages (from-to) | 188-192 |
Journal / Publication | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volume | 132 |
Issue number | 1 |
Publication status | Published - 1 Oct 1997 |
Externally published | Yes |
Link(s)
Abstract
We have carried out some ion implantation experiments into conducting and insulating substrates with a metal ion beam produced by a vacuum arc ion source. We show that the broad ion beam produced by this implanter configuration is space-charge neutralized to a high degree, allowing ion implantation of insulating materials without complication due to charge build-up. The implantation is in effect self-neutralized, with the ion beam carrying along its own cold electron flood. Published by Elsevier Science B.V.
Citation Format(s)
Self-neutralized ion implantation into insulators. / Liu, F.; Monteiro, O. R.; Yu, K. M. et al.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 132, No. 1, 01.10.1997, p. 188-192.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 132, No. 1, 01.10.1997, p. 188-192.
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review