Self-Sustaining Square-Extensional Mode Resonator Oscillator for Mass Sensing in Liquid

Habiba Begum; Abid Ali; Joshua En-Yuan Lee

doi:10.3390/proceedings2130976

Self-Sustaining Square-Extensional Mode Resonator Oscillator for Mass Sensing in Liquid

Habiba Begum^*, Abid Ali, Joshua En-Yuan Lee

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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Abstract

We present a 5.41 MHz square-extensional (SE) mode resonator in closed-loop oscillation for resonant mass sensing in the liquid phase. The resonator has been fabricated in piezoelectric thin film aluminum nitride (AlN) on silicon (Si). The strain profile of the SE mode allows for higher electromechanical coupling efficiency using piezoelectric transduction to lower the motional resistance (Rm) given the expected low quality factors (Q) in liquid (136 compared to 942 in air). By locking the device into self-sustained oscillation, the minimum detectable frequency shift is reduced from 3680 ppm (open-loop in water) to 8.76 ppm (closed-loop in air).

Original language	English
Title of host publication	Proceedings - EUROSENSORS 2018
Publisher	Multidisciplinary Digital Publishing Institute (MDPI)
Number of pages	4
Volume	2
ISBN (Print)	2504-3900
DOIs	https://doi.org/10.3390/proceedings2130976
Publication status	Published - Sept 2018
Event	32nd Eurosensors Conference (EUROSENSORS 2018) - Graz, Austria Duration: 9 Sept 2018 → 12 Sept 2018 https://www.eurosensors2018.eu/

Conference

Conference	32nd Eurosensors Conference (EUROSENSORS 2018)
Country/Territory	Austria
City	Graz
Period	9/09/18 → 12/09/18
Internet address	https://www.eurosensors2018.eu/

Research Keywords

MEMS resonator
MEMS oscillator
thin-film piezoelectric-on-silicon (TPoS)
liquid phase sensing

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This full text is made available under CC-BY 4.0. https://creativecommons.org/licenses/by/4.0/

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@inproceedings{7760c0c9d60e4504bf85cf8e34d4225f,

title = "Self-Sustaining Square-Extensional Mode Resonator Oscillator for Mass Sensing in Liquid",

abstract = "We present a 5.41 MHz square-extensional (SE) mode resonator in closed-loop oscillation for resonant mass sensing in the liquid phase. The resonator has been fabricated in piezoelectric thin film aluminum nitride (AlN) on silicon (Si). The strain profile of the SE mode allows for higher electromechanical coupling efficiency using piezoelectric transduction to lower the motional resistance (Rm) given the expected low quality factors (Q) in liquid (136 compared to 942 in air). By locking the device into self-sustained oscillation, the minimum detectable frequency shift is reduced from 3680 ppm (open-loop in water) to 8.76 ppm (closed-loop in air).",

keywords = "MEMS resonator, MEMS oscillator, thin-film piezoelectric-on-silicon (TPoS), liquid phase sensing",

author = "Habiba Begum and Abid Ali and Lee, {Joshua En-Yuan}",

year = "2018",

month = sep,

doi = "10.3390/proceedings2130976",

language = "English",

isbn = "2504-3900",

volume = "2",

booktitle = "Proceedings - EUROSENSORS 2018",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

address = "Switzerland",

note = "32nd Eurosensors Conference (EUROSENSORS 2018) ; Conference date: 09-09-2018 Through 12-09-2018",

url = "https://www.eurosensors2018.eu/",

}

Self-Sustaining Square-Extensional Mode Resonator Oscillator for Mass Sensing in Liquid. / Begum, Habiba ; Ali, Abid ; Lee, Joshua En-Yuan.
Proceedings - EUROSENSORS 2018. Vol. 2 Multidisciplinary Digital Publishing Institute (MDPI), 2018. 976.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Self-Sustaining Square-Extensional Mode Resonator Oscillator for Mass Sensing in Liquid

AU - Begum, Habiba

AU - Ali, Abid

AU - Lee, Joshua En-Yuan

PY - 2018/9

Y1 - 2018/9

N2 - We present a 5.41 MHz square-extensional (SE) mode resonator in closed-loop oscillation for resonant mass sensing in the liquid phase. The resonator has been fabricated in piezoelectric thin film aluminum nitride (AlN) on silicon (Si). The strain profile of the SE mode allows for higher electromechanical coupling efficiency using piezoelectric transduction to lower the motional resistance (Rm) given the expected low quality factors (Q) in liquid (136 compared to 942 in air). By locking the device into self-sustained oscillation, the minimum detectable frequency shift is reduced from 3680 ppm (open-loop in water) to 8.76 ppm (closed-loop in air).

AB - We present a 5.41 MHz square-extensional (SE) mode resonator in closed-loop oscillation for resonant mass sensing in the liquid phase. The resonator has been fabricated in piezoelectric thin film aluminum nitride (AlN) on silicon (Si). The strain profile of the SE mode allows for higher electromechanical coupling efficiency using piezoelectric transduction to lower the motional resistance (Rm) given the expected low quality factors (Q) in liquid (136 compared to 942 in air). By locking the device into self-sustained oscillation, the minimum detectable frequency shift is reduced from 3680 ppm (open-loop in water) to 8.76 ppm (closed-loop in air).

KW - MEMS resonator

KW - MEMS oscillator

KW - thin-film piezoelectric-on-silicon (TPoS)

KW - liquid phase sensing

U2 - 10.3390/proceedings2130976

DO - 10.3390/proceedings2130976

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 2504-3900

VL - 2

BT - Proceedings - EUROSENSORS 2018

PB - Multidisciplinary Digital Publishing Institute (MDPI)

T2 - 32nd Eurosensors Conference (EUROSENSORS 2018)

Y2 - 9 September 2018 through 12 September 2018

ER -

Self-Sustaining Square-Extensional Mode Resonator Oscillator for Mass Sensing in Liquid

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