Self-Reducible CuII Source Reagents for the CVD of Copper

Peng-Fu Hsu; Yun Chi; Tsung-Wu Lin; Chao-Shiuan Liu; Arthur J. Carty; Shie-Ming Peng

doi:10.1002/1521-3862(200101)7:1<28::AID-CVDE28>3.0.CO;2-6

Self-Reducible Cu^II Source Reagents for the CVD of Copper

Peng-Fu Hsu, Yun Chi, Tsung-Wu Lin, Chao-Shiuan Liu, Arthur J. Carty, Shie-Ming Peng

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Original language	English
Pages (from-to)	28-31
Journal	Chemical Vapor Deposition
Volume	7
Issue number	1
Online published	24 Jan 2001
DOIs	https://doi.org/10.1002/1521-3862(200101)7:1<28::AID-CVDE28>3.0.CO;2-6
Publication status	Published - Jan 2001
Externally published	Yes

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Cite this

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title = "Self-Reducible CuII Source Reagents for the CVD of Copper",

author = "Peng-Fu Hsu and Yun Chi and Tsung-Wu Lin and Chao-Shiuan Liu and Carty, {Arthur J.} and Shie-Ming Peng",

year = "2001",

month = jan,

doi = "10.1002/1521-3862(200101)7:1<28::AID-CVDE28>3.0.CO;2-6",

language = "English",

volume = "7",

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journal = "Chemical Vapor Deposition",

issn = "0948-1907",

publisher = "Wiley-VCH Verlag GmbH",

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T1 - Self-Reducible CuII Source Reagents for the CVD of Copper

AU - Hsu, Peng-Fu

AU - Chi, Yun

AU - Lin, Tsung-Wu

AU - Liu, Chao-Shiuan

AU - Carty, Arthur J.

AU - Peng, Shie-Ming

PY - 2001/1

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U2 - 10.1002/1521-3862(200101)7:1<28::AID-CVDE28>3.0.CO;2-6

DO - 10.1002/1521-3862(200101)7:1<28::AID-CVDE28>3.0.CO;2-6

M3 - RGC 21 - Publication in refereed journal

SN - 0948-1907

VL - 7

SP - 28

EP - 31

JO - Chemical Vapor Deposition

JF - Chemical Vapor Deposition

IS - 1