Self-neutralized ion implantation into insulators

F. Liu; O. R. Monteiro; K. M. Yu; I. G. Brown

doi:10.1016/S0168-583X(97)00385-6

Self-neutralized ion implantation into insulators

F. Liu
, O. R. Monteiro
, K. M. Yu
, I. G. Brown^*

^*Corresponding author for this work

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

10 Citations (Scopus)

Abstract

We have carried out some ion implantation experiments into conducting and insulating substrates with a metal ion beam produced by a vacuum arc ion source. We show that the broad ion beam produced by this implanter configuration is space-charge neutralized to a high degree, allowing ion implantation of insulating materials without complication due to charge build-up. The implantation is in effect self-neutralized, with the ion beam carrying along its own cold electron flood. Published by Elsevier Science B.V.

Original language	English
Pages (from-to)	188-192
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	132
Issue number	1
DOIs	https://doi.org/10.1016/S0168-583X(97)00385-6
Publication status	Published - 1 Oct 1997
Externally published	Yes

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title = "Self-neutralized ion implantation into insulators",

abstract = "We have carried out some ion implantation experiments into conducting and insulating substrates with a metal ion beam produced by a vacuum arc ion source. We show that the broad ion beam produced by this implanter configuration is space-charge neutralized to a high degree, allowing ion implantation of insulating materials without complication due to charge build-up. The implantation is in effect self-neutralized, with the ion beam carrying along its own cold electron flood. Published by Elsevier Science B.V.",

author = "F. Liu and Monteiro, \{O. R.\} and Yu, \{K. M.\} and Brown, \{I. G.\}",

year = "1997",

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T1 - Self-neutralized ion implantation into insulators

AU - Liu, F.

AU - Monteiro, O. R.

AU - Yu, K. M.

AU - Brown, I. G.

PY - 1997/10/1

Y1 - 1997/10/1

N2 - We have carried out some ion implantation experiments into conducting and insulating substrates with a metal ion beam produced by a vacuum arc ion source. We show that the broad ion beam produced by this implanter configuration is space-charge neutralized to a high degree, allowing ion implantation of insulating materials without complication due to charge build-up. The implantation is in effect self-neutralized, with the ion beam carrying along its own cold electron flood. Published by Elsevier Science B.V.

AB - We have carried out some ion implantation experiments into conducting and insulating substrates with a metal ion beam produced by a vacuum arc ion source. We show that the broad ion beam produced by this implanter configuration is space-charge neutralized to a high degree, allowing ion implantation of insulating materials without complication due to charge build-up. The implantation is in effect self-neutralized, with the ion beam carrying along its own cold electron flood. Published by Elsevier Science B.V.

UR - https://www.scopus.com/pages/publications/0031249530

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0031249530&origin=recordpage

U2 - 10.1016/S0168-583X(97)00385-6

DO - 10.1016/S0168-583X(97)00385-6

M3 - RGC 21 - Publication in refereed journal

SN - 0168-583X

VL - 132

SP - 188

EP - 192

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - 1

ER -

Self-neutralized ion implantation into insulators

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