TY - GEN
T1 - Selective eradication of individual carbon nanotubes from vertically aligned arrays
AU - Subramanian, Arunkumar
AU - Dong, Lixin
AU - Nelson, Bradley J.
PY - 2005/7
Y1 - 2005/7
N2 - Selective eradication is presented as a post-processing technique for as-grown vertically aligned carbon nanotubes (CNTs) for removing unwanted individual nanotubes in order to generate desired patterns. A scanning anode is applied to select a nanotube in a CNT emitter array. Using a saturated emission current, a nanotube emitter can be removed in a controlled way. Vertically aligned single multiwalled carbon nanotubes (MWNTs) are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. The scanning anode is actuated with a 3-DOF nanorobotic manipulator with nanometer resolution inside a scanning electron microscope (SEM). The patterned nanotube array can be applied as patterned emitter arrays for parallel electron-beam-induced deposition, nano imagers or read-only memory (ROM) devices for fixed pattern displaying or recording.
AB - Selective eradication is presented as a post-processing technique for as-grown vertically aligned carbon nanotubes (CNTs) for removing unwanted individual nanotubes in order to generate desired patterns. A scanning anode is applied to select a nanotube in a CNT emitter array. Using a saturated emission current, a nanotube emitter can be removed in a controlled way. Vertically aligned single multiwalled carbon nanotubes (MWNTs) are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. The scanning anode is actuated with a 3-DOF nanorobotic manipulator with nanometer resolution inside a scanning electron microscope (SEM). The patterned nanotube array can be applied as patterned emitter arrays for parallel electron-beam-induced deposition, nano imagers or read-only memory (ROM) devices for fixed pattern displaying or recording.
KW - Carbon nanotube array
KW - Field emission
KW - Nanorobotic manipulator
KW - Scanning anode
KW - Selective eradication
UR - http://www.scopus.com/inward/record.url?scp=27644516021&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-27644516021&origin=recordpage
U2 - 10.1109/aim.2005.1500974
DO - 10.1109/aim.2005.1500974
M3 - RGC 32 - Refereed conference paper (with host publication)
T3 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
SP - 105
EP - 110
BT - Proceedings of the 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)
PB - IEEE
T2 - 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2005)
Y2 - 24 July 2005 through 28 July 2005
ER -