Abstract
In this paper, we report the selective area synthesis of gallium oxide (Ga2O3) nano-wires on gold patterned gallium arsenide (GaAs) substrate which have been treated by ion implantation. The GaAs substrate was first treated with implantation of acetylene (C2H2) ions, and then followed by coating the surface with a 2nm thick gold film. After rapid thermal anneal (RTA) at 950°C for 15 seconds, Ga2O 3 nano-wires were found on gold patterned surface. The Ga 2O3 nano-wires with diameters of 50-500nm were examined by Raman spectroscopy, scanning electron microscopy (SEM), and cathodoluminescence (CL). We also measured the I-V behavior for Ga2O3 material under the excitation by various laser radiations, hence demonstrating its potential applications as UV sensors. In addition, nano-particles of gold were found at the tip of the nano-wires, suggesting that a vapor-liquid-solid (VLS) mechanism was involved. © 2007 IEEE.
| Original language | English |
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| Title of host publication | IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007 |
| Pages | 1171-1174 |
| DOIs | |
| Publication status | Published - 2007 |
| Event | IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007 - Tainan, Taiwan, China Duration: 20 Dec 2007 → 22 Dec 2007 |
Conference
| Conference | IEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007 |
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| Place | Taiwan, China |
| City | Tainan |
| Period | 20/12/07 → 22/12/07 |