Selective-area growth of gallium oxide nanowires: Synthesis, characterization, and device application

K. C. Lo, H. Wang, H. P. Ho, P. K. Chu

    Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

    1 Citation (Scopus)

    Abstract

    In this paper, we report the selective area synthesis of gallium oxide (Ga2O3) nano-wires on gold patterned gallium arsenide (GaAs) substrate which have been treated by ion implantation. The GaAs substrate was first treated with implantation of acetylene (C2H2) ions, and then followed by coating the surface with a 2nm thick gold film. After rapid thermal anneal (RTA) at 950°C for 15 seconds, Ga2O 3 nano-wires were found on gold patterned surface. The Ga 2O3 nano-wires with diameters of 50-500nm were examined by Raman spectroscopy, scanning electron microscopy (SEM), and cathodoluminescence (CL). We also measured the I-V behavior for Ga2O3 material under the excitation by various laser radiations, hence demonstrating its potential applications as UV sensors. In addition, nano-particles of gold were found at the tip of the nano-wires, suggesting that a vapor-liquid-solid (VLS) mechanism was involved. © 2007 IEEE.
    Original languageEnglish
    Title of host publicationIEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007
    Pages1171-1174
    DOIs
    Publication statusPublished - 2007
    EventIEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007 - Tainan, Taiwan, China
    Duration: 20 Dec 200722 Dec 2007

    Conference

    ConferenceIEEE Conference on Electron Devices and Solid-State Circuits 2007, EDSSC 2007
    PlaceTaiwan, China
    CityTainan
    Period20/12/0722/12/07

    Fingerprint

    Dive into the research topics of 'Selective-area growth of gallium oxide nanowires: Synthesis, characterization, and device application'. Together they form a unique fingerprint.

    Cite this