Sealed three-dimensional nanochannels

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Overview

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Material Science

Polymers Material Science

Lithography Material Science

Solvent Material Science

Surface (Surface Sc... Material Science

Sealant Material Science

Dielectric Material Material Science

Vapor Material Science

Keyphrases

Three-dimensional (... Keyphrases

Nanochannel Keyphrases

Sacrificial Polymer Keyphrases

Sacrificial Layer Keyphrases

High Pressure Keyphrases

Dielectric Keyphrases

Wet Chemical Method Keyphrases

O2 Plasma Keyphrases

Two-level Keyphrases

Vertical Dimension Keyphrases

High Power Keyphrases

Planarization Keyphrases

Multiple Levels Keyphrases

Void-free Keyphrases

Cross-sectional Dim... Keyphrases

Nanoimprint Lithogr... Keyphrases

Common Solvent Keyphrases

Thermal Nanoimprint... Keyphrases

Sealing Material Keyphrases

Self-supporting Keyphrases

Plasma-enhanced Che... Keyphrases

INIS

dimensions INIS

dielectrics INIS

chemical vapor depo... INIS

high pressure INIS

sealing materials INIS

Research OutputsResearch Output authored by Sealed three-dimensional nanochannels is tagged with the concept

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