Roughening kinetics of thin films in the presence of both stress and Ehrlich-Schwobel barrier

Z. J. Liu, Y. G. Shen

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Abstract

    The use of a linear continuum model to investigate the growth of thin films in the presence of Ehrlich-Schwobel barrier (ESB) and stress was analyzed. It was observed that the roughening kinetics of the system was dependent on the growth temperature. The ESB dominated the surface growth at low temperatures. At low temperatures, the morphology instability was controlled by the stress. The surface roughness was found dependent on the growth time at the early stages of growth and at the last stages of growth, unstable growth was obtained because of enhanced stress and ESB effects.
    Original languageEnglish
    Pages (from-to)5404-5406
    JournalApplied Physics Letters
    Volume83
    Issue number26
    DOIs
    Publication statusPublished - 29 Dec 2003

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