TY - JOUR
T1 - Room-temperature solution processing of high-mobility MoS2 thin films
AU - Xue, Junying
AU - Xia, Tingyi
AU - Li, Tong
AU - He, Jing
AU - Wang, Shengqi
AU - Li, Wenjie
AU - Ge, Jifeng
AU - Tan, Ruihao
AU - Dai, Yongping
AU - He, Qiyuan
AU - Li, Na
AU - Zhang, Guangyu
AU - Duan, Xiangfeng
AU - Lin, Zhaoyang
PY - 2025
Y1 - 2025
N2 - Chemical vapor deposition (CVD) has been the prevailing approach to synthesize high-quality 2D molybdenum disulfide (MoS2) for electronic devices. However, it typically requires a high synthetic temperature (e.g., 400-900 ˚C) and is thus costly and incompatible with flexible plastic substrates. Here we report the low-thermal-budget (e.g., at room temperature) solution-based deposition of high-mobility wafer-scale semiconducting MoS2 thin films, enabled by a polymer-free alkylammonium-capped MoS2 ink. In contrast to conventional long-chain polymer surfactants, the compact alkylammonium ligands exhibit adequate binding to MoS2 and can be washed away by solvent to restore atomically clean and organics-free MoS2 thin films. Therefore, the polymer-free ink provides a potential solution to the long-standing trade-off between thermal budget and electrical performance in MoS2. We show room-temperature-processed MoS2 thin films exhibiting an average electron mobility of 50 cm2·V-1·s-1, which can be further improved to 68 cm2·V-1·s-1 with 200 °C processing. The resulting transistors show a high degree of uniformity and can be readily implemented for scalable logic integration, ring oscillators, and driving circuits for organic light-emitting diodes. Especially, the fabricated MoS2 ring oscillator outputs an oscillation frequency of > 300 kHz, showing promising applications in functional circuits based on layered semiconductors. © The Author(s) 2025.
AB - Chemical vapor deposition (CVD) has been the prevailing approach to synthesize high-quality 2D molybdenum disulfide (MoS2) for electronic devices. However, it typically requires a high synthetic temperature (e.g., 400-900 ˚C) and is thus costly and incompatible with flexible plastic substrates. Here we report the low-thermal-budget (e.g., at room temperature) solution-based deposition of high-mobility wafer-scale semiconducting MoS2 thin films, enabled by a polymer-free alkylammonium-capped MoS2 ink. In contrast to conventional long-chain polymer surfactants, the compact alkylammonium ligands exhibit adequate binding to MoS2 and can be washed away by solvent to restore atomically clean and organics-free MoS2 thin films. Therefore, the polymer-free ink provides a potential solution to the long-standing trade-off between thermal budget and electrical performance in MoS2. We show room-temperature-processed MoS2 thin films exhibiting an average electron mobility of 50 cm2·V-1·s-1, which can be further improved to 68 cm2·V-1·s-1 with 200 °C processing. The resulting transistors show a high degree of uniformity and can be readily implemented for scalable logic integration, ring oscillators, and driving circuits for organic light-emitting diodes. Especially, the fabricated MoS2 ring oscillator outputs an oscillation frequency of > 300 kHz, showing promising applications in functional circuits based on layered semiconductors. © The Author(s) 2025.
UR - https://www.scopus.com/pages/publications/105026240217
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-105026240217&origin=recordpage
U2 - 10.1038/s41467-025-66523-z
DO - 10.1038/s41467-025-66523-z
M3 - RGC 21 - Publication in refereed journal
C2 - 41274880
SN - 2041-1723
VL - 16
JO - Nature Communications
JF - Nature Communications
M1 - 11538
ER -