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Room-temperature solution processing of high-mobility MoS2 thin films

  • Junying Xue (Co-first Author)
  • , Tingyi Xia (Co-first Author)
  • , Tong Li (Co-first Author)
  • , Jing He
  • , Shengqi Wang
  • , Wenjie Li
  • , Jifeng Ge
  • , Ruihao Tan
  • , Yongping Dai
  • , Qiyuan He
  • , Na Li
  • , Guangyu Zhang
  • , Xiangfeng Duan*
  • , Zhaoyang Lin*
  • *Corresponding author for this work

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Abstract

Chemical vapor deposition (CVD) has been the prevailing approach to synthesize high-quality 2D molybdenum disulfide (MoS2) for electronic devices. However, it typically requires a high synthetic temperature (e.g., 400-900 ˚C) and is thus costly and incompatible with flexible plastic substrates. Here we report the low-thermal-budget (e.g., at room temperature) solution-based deposition of high-mobility wafer-scale semiconducting MoS2 thin films, enabled by a polymer-free alkylammonium-capped MoS2 ink. In contrast to conventional long-chain polymer surfactants, the compact alkylammonium ligands exhibit adequate binding to MoS2 and can be washed away by solvent to restore atomically clean and organics-free MoS2 thin films. Therefore, the polymer-free ink provides a potential solution to the long-standing trade-off between thermal budget and electrical performance in MoS2. We show room-temperature-processed MoS2 thin films exhibiting an average electron mobility of 50 cm2·V-1·s-1, which can be further improved to 68 cm2·V-1·s-1 with 200 °C processing. The resulting transistors show a high degree of uniformity and can be readily implemented for scalable logic integration, ring oscillators, and driving circuits for organic light-emitting diodes. Especially, the fabricated MoS2 ring oscillator outputs an oscillation frequency of > 300 kHz, showing promising applications in functional circuits based on layered semiconductors. © The Author(s) 2025.
Original languageEnglish
Article number11538
JournalNature Communications
Volume16
Online published22 Nov 2025
DOIs
Publication statusPublished - 2025

Funding

This project was supported by the National Natural Science Foundation of China (NSFC, grant No. 22275113 (Z.L.)), Beijing Natural Science Foundation (grant No. Z240025 (Z.L.)), Tsinghua University Dushi program (Z.L.), and Initiative Scientific Research Program (Z.L.), and China Postdoctoral Science Foundation (grant No. 2025T180260 (J.H.)). We acknowledge the Cell Biology Facility affiliated with the Center of Biomedical Analysis, Tsinghua University, for technical assistance and equipment support with Hitachi H-7650. We acknowledge the Center of Nanofabrication, Tsinghua University for support on AFM, photolithography, and material etching.

Publisher's Copyright Statement

  • This full text is made available under CC-BY-NC-ND 4.0. https://creativecommons.org/licenses/by-nc-nd/4.0/

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