Abstract
The role of oxygen pressure during the pulsed laser deposition of lead zirconate stannate titanates (PLZST) thin films was discussed. It was found that the oxygen pressure was in the range of 100-125 mTorr. The roughness of the films increases with increasing oxygen pressure. During deposition, fatigue and leakage current were also found to decrease with the oxygen pressure. The results show that for the samples deposited under higher oxygen pressure, there exist low-frequency dielectric dispersion process.
© 2004 American Institute of Physics
© 2004 American Institute of Physics
| Original language | English |
|---|---|
| Pages (from-to) | 569-574 |
| Journal | Journal of Applied Physics |
| Volume | 96 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1 Jul 2004 |
Bibliographical note
Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].Funding
This work was supported in full by a HK RGC grant (Grant No. CityU 1049/02E) via the City University of Hong Kong (CityU). The authors would like to acknowledge the technical assistance from T. F. Hong and Daniel Yau of CityU.
RGC Funding Information
- RGC-funded
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