Abstract
Assembly and attachment of microparts are of fundamental importance in the development of threedimensional complex microsystems. Adhesive bonding is an important method to assembly micromachining parts. We present an approach to manipulate micron size adhesive droplets for use in robotic microassembly. A micro-probe is developed and bonded to a micro-robot. Adhesive droplets are picked up from adhesive reservoir, and placed on target spots. The effect of surface energy is considered in the design of the micro-probe. The size of manipulated adhesive droplet is determined from the dimension of the micro-probe tip. Experiments were conducted to manipulate adhesive droplets, and assemble three-dimensional micro-mirrors. © 2009 IEEE.
| Original language | English |
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| Title of host publication | 2009 IEEE International Conference on Information and Automation, ICIA 2009 |
| Pages | 1562-1567 |
| DOIs | |
| Publication status | Published - 2009 |
| Externally published | Yes |
| Event | 2009 IEEE International Conference on Information and Automation, ICIA 2009 - Zhuhai, Macau, China Duration: 22 Jun 2009 → 25 Jun 2009 |
Conference
| Conference | 2009 IEEE International Conference on Information and Automation, ICIA 2009 |
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| Place | China |
| City | Zhuhai, Macau |
| Period | 22/06/09 → 25/06/09 |