Reversed nonlinear oscillations in lamé-mode single-crystal-silicon microresonators

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Original languageEnglish
Article number6291747
Pages (from-to)1492-1494
Journal / PublicationIEEE Electron Device Letters
Issue number10
Publication statusPublished - 2012


The spring hardening effect is reported here for the first time in a single-crystal-silicon bulk mode resonator. Reversing nonlinear behaviors (changing from spring softening to hardening) has been observed in fabricated silicon-on-insulator square-plate resonators of identical dimensions but aligned against different crystal orientations. This orientation-dependent reversal in the nonlinearity is explained using a dynamic model which incorporates a nonlinear strain-stress relation. The frequency response of the devices (with different dimensions) under various driving conditions can be closely predicted using the model. © 2012 IEEE.

Research Area(s)

  • MEMS, micromechanical resonator, nonlinearity, single-crystal silicon (SCS)