Reversed nonlinear oscillations in lamé-mode single-crystal-silicon microresonators
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
Original language | English |
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Article number | 6291747 |
Pages (from-to) | 1492-1494 |
Journal / Publication | IEEE Electron Device Letters |
Volume | 33 |
Issue number | 10 |
Publication status | Published - 2012 |
Link(s)
Abstract
The spring hardening effect is reported here for the first time in a single-crystal-silicon bulk mode resonator. Reversing nonlinear behaviors (changing from spring softening to hardening) has been observed in fabricated silicon-on-insulator square-plate resonators of identical dimensions but aligned against different crystal orientations. This orientation-dependent reversal in the nonlinearity is explained using a dynamic model which incorporates a nonlinear strain-stress relation. The frequency response of the devices (with different dimensions) under various driving conditions can be closely predicted using the model. © 2012 IEEE.
Research Area(s)
- MEMS, micromechanical resonator, nonlinearity, single-crystal silicon (SCS)
Citation Format(s)
Reversed nonlinear oscillations in lamé-mode single-crystal-silicon microresonators. / Zhu, Haoshen; Lee, Joshua E.-Y.
In: IEEE Electron Device Letters, Vol. 33, No. 10, 6291747, 2012, p. 1492-1494.
In: IEEE Electron Device Letters, Vol. 33, No. 10, 6291747, 2012, p. 1492-1494.
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review