Abstract
The spring hardening effect is reported here for the first time in a single-crystal-silicon bulk mode resonator. Reversing nonlinear behaviors (changing from spring softening to hardening) has been observed in fabricated silicon-on-insulator square-plate resonators of identical dimensions but aligned against different crystal orientations. This orientation-dependent reversal in the nonlinearity is explained using a dynamic model which incorporates a nonlinear strain-stress relation. The frequency response of the devices (with different dimensions) under various driving conditions can be closely predicted using the model. © 2012 IEEE.
| Original language | English |
|---|---|
| Article number | 6291747 |
| Pages (from-to) | 1492-1494 |
| Journal | IEEE Electron Device Letters |
| Volume | 33 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 2012 |
Research Keywords
- MEMS
- micromechanical resonator
- nonlinearity
- single-crystal silicon (SCS)
Fingerprint
Dive into the research topics of 'Reversed nonlinear oscillations in lamé-mode single-crystal-silicon microresonators'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver