Reusable acoustic tweezers enable 2D patterning of microparticles in microchamber on a disposable silicon chip superstrate

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

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Detail(s)

Original languageEnglish
Title of host publicationIEEE Sensors 2020
Subtitle of host publication2020 Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers, Inc.
ISBN (electronic)978-1-7281-6801-2
Publication statusPublished - 25 Oct 2020

Publication series

NameProceedings of IEEE Sensors
Volume2020-October
ISSN (Print)1930-0395
ISSN (electronic)2168-9229

Conference

TitleIEEE SENSORS 2020
LocationVirtual Conference
Period25 - 28 October 2020

Abstract

We report the first demonstration of two-dimensional (2D) patterning of microparticles on a silicon superstrate via a plug-and-play reusable acoustofluidic setup. The proposed integrated device comprises two independent parts: (1) a silicon superstrate enclosed in a PDMS microfluidic chamber (containing the particles) and (2) a reusable lithium niobate (LN) piezoelectric substrate for generating standing surface acoustic waves (SSAW). The proposed method enables patterning of particles on a silicon superstrate with the aim of ultimately enabling 2D patterning of particles or cells on functional silicon micromechanical chips. Such a capability would enable functional applications such as diagnostics and biosensing. This contactless, label-free, low-cost technique would be widely employed in biological application regardless of shape, size, charge or polarity of samples.

Research Area(s)

  • 2D patterning, silicon superstrate, acoustofluidic platform, plug-and-play, microparticles

Citation Format(s)

Reusable acoustic tweezers enable 2D patterning of microparticles in microchamber on a disposable silicon chip superstrate. / Qian, Jingui; Ren, Jifeng; Liu, Yi et al.
IEEE Sensors 2020: 2020 Conference Proceedings. Institute of Electrical and Electronics Engineers, Inc., 2020. 9278717 (Proceedings of IEEE Sensors; Vol. 2020-October).

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review