TY - JOUR
T1 - Resonance frequency response of geometrically nonlinear micro-switches under electrical actuation
AU - Jia, X. L.
AU - Yang, J.
AU - Kitipornchai, S.
AU - Lim, C. W.
PY - 2012/7/2
Y1 - 2012/7/2
N2 - This paper presents an analytical study on the forced vibration of electrically actuated micro-switches near resonance region, taking into consideration the intermolecular force, axial residual stress, and geometrical nonlinearity due to mid-plane stretching. The micro-switch is made of either homogeneous material or non-homogeneous functionally graded materials with two material phases and subjected to a time-varying applied voltage consisting of a DC component and a small AC component. The perturbation-based method of averaging is employed to solve the nonlinear partial differential governing equations to obtain the resonance frequency responses of both the vibration amplitude and phase angle. The present analysis is validated through direct comparisons with published experimental results and excellent agreement has been achieved. A parametric study is conducted to show the effects of geometrical nonlinearity, intermolecular Casimir force, the electrostatic force due to DC voltage, the AC voltage induced harmonic force, quality factor, axial residual stress and material composition on the frequency response characteristics. © 2012 Elsevier Ltd.
AB - This paper presents an analytical study on the forced vibration of electrically actuated micro-switches near resonance region, taking into consideration the intermolecular force, axial residual stress, and geometrical nonlinearity due to mid-plane stretching. The micro-switch is made of either homogeneous material or non-homogeneous functionally graded materials with two material phases and subjected to a time-varying applied voltage consisting of a DC component and a small AC component. The perturbation-based method of averaging is employed to solve the nonlinear partial differential governing equations to obtain the resonance frequency responses of both the vibration amplitude and phase angle. The present analysis is validated through direct comparisons with published experimental results and excellent agreement has been achieved. A parametric study is conducted to show the effects of geometrical nonlinearity, intermolecular Casimir force, the electrostatic force due to DC voltage, the AC voltage induced harmonic force, quality factor, axial residual stress and material composition on the frequency response characteristics. © 2012 Elsevier Ltd.
UR - http://www.scopus.com/inward/record.url?scp=84862829099&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84862829099&origin=recordpage
U2 - 10.1016/j.jsv.2012.02.026
DO - 10.1016/j.jsv.2012.02.026
M3 - RGC 21 - Publication in refereed journal
SN - 0022-460X
VL - 331
SP - 3397
EP - 3411
JO - Journal of Sound and Vibration
JF - Journal of Sound and Vibration
IS - 14
ER -