Requirements for High Voltage Power Modulator for Long-Pulse Plasma Immersion Ion Implantation

Xuchu Zeng, Dixon T. K. Kwok, Xiubo Tian, Chung Chan, Paul K. Chu

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - Apr 2000
Event	International High Voltage Workshop 2000 - Newport Beach, United States Duration: 10 Apr 2000 → 12 Apr 2000

Workshop	International High Voltage Workshop 2000
Country/Territory	United States
City	Newport Beach
Period	10/04/00 → 12/04/00

Other Access Options

@conference{332c2db576874b4bab6ac5ee44939e0c,

title = "Requirements for High Voltage Power Modulator for Long-Pulse Plasma Immersion Ion Implantation",

author = "Xuchu Zeng and Kwok, {Dixon T. K.} and Xiubo Tian and Chung Chan and Chu, {Paul K.}",

year = "2000",

month = apr,

language = "English",

note = "International High Voltage Workshop 2000 ; Conference date: 10-04-2000 Through 12-04-2000",

}

Requirements for High Voltage Power Modulator for Long-Pulse Plasma Immersion Ion Implantation. / Zeng, Xuchu; Kwok, Dixon T. K.; Tian, Xiubo et al.
2000. Paper presented at International High Voltage Workshop 2000, Newport Beach, California, United States.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Requirements for High Voltage Power Modulator for Long-Pulse Plasma Immersion Ion Implantation

AU - Zeng, Xuchu

AU - Kwok, Dixon T. K.

AU - Tian, Xiubo

AU - Chan, Chung

AU - Chu, Paul K.

PY - 2000/4

Y1 - 2000/4

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - International High Voltage Workshop 2000

Y2 - 10 April 2000 through 12 April 2000

ER -