Reliability in Modeling of Spectroscopic Ellipsometry

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

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Detail(s)

Original languageEnglish
Pages (from-to)R1-R2
Journal / PublicationPhysica Status Solidi (A) Applied Research
Volume182
Issue number2
Online published21 Dec 2000
Publication statusPublished - Dec 2000

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DOI

DOI
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Link to Scopus https://www.scopus.com/record/display.uri?eid=2-s2.0-0034498235&origin=recordpage
Permanent Link https://scholars.cityu.edu.hk/en/publications/publication(642e5787-f2a9-4d5f-b1a6-d02316e77285).html

Abstract

The incorrect estimation of the structural parameters of a-Si1-x:Hx thin film in the fitting of spectroscopic ellipsometry was investigated. It was found that using of unsuitable dielectric functions in determining the structure of an a-Si1-x:Hx thin film of unknown composition lead to errors.

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Spectroscopic ellip... Engineering & Materials S...
54
Thin films Engineering & Materials S...
21
Chemical analysis Engineering & Materials S...
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Citation Format(s)

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Reliability in Modeling of Spectroscopic Ellipsometry. / LIN, S. H.; CHAN, Y. C.; WEBB, D. P. et al.

In: Physica Status Solidi (A) Applied Research, Vol. 182, No. 2, 12.2000, p. R1-R2.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review