RELAXED SIGE-ON-INSULATOR SUBSTRATES THOUGH IMPLANTING OXYGEN INTO PSEUDOMORPHIC SIGE/SI HETEROSTRUCTURE

Miao Zhang; Zhenghua An; Yanjun Wu; Zengfeng Di; Paul K. Chu; Chenglu Lin

RELAXED SIGE-ON-INSULATOR SUBSTRATES THOUGH IMPLANTING OXYGEN INTO PSEUDOMORPHIC SIGE/SI HETEROSTRUCTURE

Miao Zhang, Zhenghua An, Yanjun Wu, Zengfeng Di, Paul K. Chu, Chenglu Lin

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	Silicon-on-Insulator Technology and Devices XI
Subtitle of host publication	Proceedings of the International Symposium
Editors	S. Cristoloveanu
Pages	111-116
Publication status	Published - Apr 2003
Event	11th International Symposium on Silicon-On-Insulator Technology and Device - 203rd Meeting of the Electrochemical Society - Paris, France Duration: 28 Apr 2003 → 2 Feb 2007 https://www.electrochem.org/dl/ma/203/symposia/pij3.htm

Publication series

Name	Electrochemical Society Proceedings
Volume	2003-05

Conference

Conference	11th International Symposium on Silicon-On-Insulator Technology and Device - 203rd Meeting of the Electrochemical Society
Country/Territory	France
City	Paris
Period	28/04/03 → 2/02/07
Internet address	https://www.electrochem.org/dl/ma/203/symposia/pij3.htm

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@inproceedings{dc653b19c50b47089797bf26cacb7107,

title = "RELAXED SIGE-ON-INSULATOR SUBSTRATES THOUGH IMPLANTING OXYGEN INTO PSEUDOMORPHIC SIGE/SI HETEROSTRUCTURE",

author = "Miao Zhang and Zhenghua An and Yanjun Wu and Zengfeng Di and Chu, {Paul K.} and Chenglu Lin",

year = "2003",

month = apr,

language = "English",

isbn = "156677375X",

series = "Electrochemical Society Proceedings",

pages = "111--116",

editor = "S. Cristoloveanu",

booktitle = "Silicon-on-Insulator Technology and Devices XI",

note = "11th International Symposium on Silicon-On-Insulator Technology and Device - 203rd Meeting of the Electrochemical Society ; Conference date: 28-04-2003 Through 02-02-2007",

url = "https://www.electrochem.org/dl/ma/203/symposia/pij3.htm",

}

Zhang, M, An, Z, Wu, Y, Di, Z, Chu, PK & Lin, C 2003, RELAXED SIGE-ON-INSULATOR SUBSTRATES THOUGH IMPLANTING OXYGEN INTO PSEUDOMORPHIC SIGE/SI HETEROSTRUCTURE. in S Cristoloveanu (ed.), Silicon-on-Insulator Technology and Devices XI: Proceedings of the International Symposium. Electrochemical Society Proceedings, vol. 2003-05, pp. 111-116, 11th International Symposium on Silicon-On-Insulator Technology and Device - 203rd Meeting of the Electrochemical Society, Paris, France, 28/04/03.

RELAXED SIGE-ON-INSULATOR SUBSTRATES THOUGH IMPLANTING OXYGEN INTO PSEUDOMORPHIC SIGE/SI HETEROSTRUCTURE. / Zhang, Miao; An, Zhenghua; Wu, Yanjun et al.
Silicon-on-Insulator Technology and Devices XI: Proceedings of the International Symposium. ed. / S. Cristoloveanu. 2003. p. 111-116 (Electrochemical Society Proceedings; Vol. 2003-05).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - RELAXED SIGE-ON-INSULATOR SUBSTRATES THOUGH IMPLANTING OXYGEN INTO PSEUDOMORPHIC SIGE/SI HETEROSTRUCTURE

AU - Zhang, Miao

AU - An, Zhenghua

AU - Wu, Yanjun

AU - Di, Zengfeng

AU - Chu, Paul K.

AU - Lin, Chenglu

PY - 2003/4

Y1 - 2003/4

UR - http://www.cityu.edu.hk/phy/appkchu/Publications/2003/03.C06.pdf

UR - https://books.google.com.hk/books?id=4pYa6fsAb_MC&pg=PA111&lpg=PA111&dq=%22Relaxed+SiGe-on-Insulator+Substrates+through+Implanting+Oxygen+into+Pseudomorphic+SiGe/Si+Heterostructure%22&source=bl&ots=9F9sB8KvqQ&sig=ACfU3U3H2jOB0tNfz8VtXnyjjue9TKR-nQ&hl=en&sa=X&ved=2ahUKEwjSpd2WwJ7oAhWNc3AKHVP5A-kQ6AEwAHoECAYQAQ#v=onepage&q=%22Relaxed%20SiGe-on-Insulator%20Substrates%20through%20Implanting%20Oxygen%20into%20Pseudomorphic%20SiGe%2FSi%20Heterostructure%22&f=false

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 156677375X

T3 - Electrochemical Society Proceedings

SP - 111

EP - 116

BT - Silicon-on-Insulator Technology and Devices XI

A2 - Cristoloveanu, S.

T2 - 11th International Symposium on Silicon-On-Insulator Technology and Device - 203rd Meeting of the Electrochemical Society

Y2 - 28 April 2003 through 2 February 2007

ER -

RELAXED SIGE-ON-INSULATOR SUBSTRATES THOUGH IMPLANTING OXYGEN INTO PSEUDOMORPHIC SIGE/SI HETEROSTRUCTURE

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