Relative fluorine concentrations in radio frequency/electron cyclotron resonance hybrid glow discharges

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

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Author(s)

  • M. L. Passow
  • J. T P Pender
  • M. L. Brake
  • K. T. Sung
  • Y. Liu
  • M. E. Elta

Detail(s)

Original languageEnglish
Pages (from-to)818-820
Journal / PublicationApplied Physics Letters
Volume60
Issue number7
Publication statusPublished - 1992
Externally publishedYes

Abstract

The relative concentration of atomic fluorine was measured in a radio frequency (rf) glow discharge and a modified electron cyclotron resonance microwave/rf hybrid discharge in CF4 using an actinometric technique. The dependence of fluorine concentration on rf and microwave power, pressure, flow, and excitation source are presented. Anomalous behavior with rf power at constant microwave power was observed when using the Ar 750-nm line as the actinometric species.

Citation Format(s)

Relative fluorine concentrations in radio frequency/electron cyclotron resonance hybrid glow discharges. / Passow, M. L.; Pender, J. T P; Brake, M. L.; Sung, K. T.; Liu, Y.; Pang, S. W.; Elta, M. E.

In: Applied Physics Letters, Vol. 60, No. 7, 1992, p. 818-820.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal