Relative fluorine concentrations in radio frequency/electron cyclotron resonance hybrid glow discharges

M. L. Passow; J. T P Pender; M. L. Brake; K. T. Sung; Y. Liu; S. W. Pang; M. E. Elta

doi:10.1063/1.107428

Relative fluorine concentrations in radio frequency/electron cyclotron resonance hybrid glow discharges

M. L. Passow, J. T P Pender, M. L. Brake, K. T. Sung, Y. Liu, S. W. Pang, M. E. Elta

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

3 Citations (Scopus)

Abstract

The relative concentration of atomic fluorine was measured in a radio frequency (rf) glow discharge and a modified electron cyclotron resonance microwave/rf hybrid discharge in CF₄ using an actinometric technique. The dependence of fluorine concentration on rf and microwave power, pressure, flow, and excitation source are presented. Anomalous behavior with rf power at constant microwave power was observed when using the Ar 750-nm line as the actinometric species.

Original language	English
Pages (from-to)	818-820
Journal	Applied Physics Letters
Volume	60
Issue number	7
DOIs	https://doi.org/10.1063/1.107428
Publication status	Published - 1992
Externally published	Yes

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@article{13d88cd1048b40f290b9dfd7f291a1d0,

title = "Relative fluorine concentrations in radio frequency/electron cyclotron resonance hybrid glow discharges",

abstract = "The relative concentration of atomic fluorine was measured in a radio frequency (rf) glow discharge and a modified electron cyclotron resonance microwave/rf hybrid discharge in CF4 using an actinometric technique. The dependence of fluorine concentration on rf and microwave power, pressure, flow, and excitation source are presented. Anomalous behavior with rf power at constant microwave power was observed when using the Ar 750-nm line as the actinometric species.",

author = "Passow, {M. L.} and Pender, {J. T P} and Brake, {M. L.} and Sung, {K. T.} and Y. Liu and Pang, {S. W.} and Elta, {M. E.}",

year = "1992",

doi = "10.1063/1.107428",

language = "English",

volume = "60",

pages = "818--820",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "7",

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TY - JOUR

T1 - Relative fluorine concentrations in radio frequency/electron cyclotron resonance hybrid glow discharges

AU - Passow, M. L.

AU - Pender, J. T P

AU - Brake, M. L.

AU - Sung, K. T.

AU - Liu, Y.

AU - Pang, S. W.

AU - Elta, M. E.

PY - 1992

Y1 - 1992

N2 - The relative concentration of atomic fluorine was measured in a radio frequency (rf) glow discharge and a modified electron cyclotron resonance microwave/rf hybrid discharge in CF4 using an actinometric technique. The dependence of fluorine concentration on rf and microwave power, pressure, flow, and excitation source are presented. Anomalous behavior with rf power at constant microwave power was observed when using the Ar 750-nm line as the actinometric species.

AB - The relative concentration of atomic fluorine was measured in a radio frequency (rf) glow discharge and a modified electron cyclotron resonance microwave/rf hybrid discharge in CF4 using an actinometric technique. The dependence of fluorine concentration on rf and microwave power, pressure, flow, and excitation source are presented. Anomalous behavior with rf power at constant microwave power was observed when using the Ar 750-nm line as the actinometric species.

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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-5944263264&origin=recordpage

U2 - 10.1063/1.107428

DO - 10.1063/1.107428

M3 - RGC 21 - Publication in refereed journal

SN - 0003-6951

VL - 60

SP - 818

EP - 820

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 7

ER -

Relative fluorine concentrations in radio frequency/electron cyclotron resonance hybrid glow discharges

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