Relationship between resistivity of metallic film and its surface roughness, residual stress

Wu Tang; Longjiang Deng; Kewei Xu; Lu Jian

Relationship between resistivity of metallic film and its surface roughness, residual stress

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

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Engineering & Materials Science

100

Metallic films Engineering & Materials S...

Residual stresses Engineering & Materials S...

Surface roughness Engineering & Materials S...

Strain energy Engineering & Materials S...

Tensile stress Engineering & Materials S...

Crystal orientation Engineering & Materials S...

Magnetron sputterin... Engineering & Materials S...

Substrates Engineering & Materials S...

Research OutputsResearch Output authored by Relationship between resistivity of metallic film and its surface roughness, residual stress is tagged with the concept

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