Relationship between resistivity of metallic film and its surface roughness, residual stress
Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review
Author(s)
Detail(s)
| Original language | English |
|---|---|
| Pages (from-to) | 617-620 |
| Journal / Publication | 稀有金属材料与工程/Rare Metal Materials and Engineering |
| Volume | 37 |
| Issue number | 4 |
| Publication status | Published - Apr 2008 |
| Externally published | Yes |
Link(s)
Abstract
Au film was fabricated on Al2O3 substrate by magnetron sputtering. The relationship between resistivity of metallic film and its surface roughness, residual stress was investigated according to experimental results. The results show that the resistivity of the metallic film correlates with surface roughness and residual stress. The increase of resistivity with surface roughness and tensile residual stress can be explained by the strain energy theory. It can be inferred that crystal orientation may be connect with the mechanical behavior and functional property of metallic film.
Research Area(s)
- Metallic film, Residual stress, Resistivity, Surface roughness
Citation Format(s)
Relationship between resistivity of metallic film and its surface roughness, residual stress. / Tang, Wu; Deng, Longjiang; Xu, Kewei et al.
In: 稀有金属材料与工程/Rare Metal Materials and Engineering, Vol. 37, No. 4, 04.2008, p. 617-620.Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review
