Reducing anchor loss in piezoelectric-on-silicon laterally vibrating resonators by combination of etched-slots and convex edges

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Engineering & Materials Science

Research OutputsResearch Output authored by Reducing anchor loss in piezoelectric-on-silicon laterally vibrating resonators by combination of etched-slots and convex edges is tagged with the concept