RECONFIGURABLE ACOUSTOFLUIDIC MANIPULATION OF PARTICLES IN RING-LIKE RICH PATTERNS ENABLED ON A BULK MICROMACHINED SILICON CHIP

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

1 Scopus Citations
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Detail(s)

Original languageEnglish
Title of host publication2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
PublisherInstitute of Electrical and Electronics Engineers, Inc.
Pages365-368
ISBN (electronic)978-0-7381-2562-6, 978-1-6654-1267-4
ISBN (print)978-1-6654-4845-1
Publication statusPublished - Jun 2021

Publication series

NameInternational Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS
ISSN (Print)2167-0013
ISSN (electronic)2167-0021

Conference

Title21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021)
LocationVirtual
PlaceUnited States
CityOrlando
Period20 - 25 June 2021

Abstract

Acoustofluidic platforms typically enable only rectangular matrix-like of particle patterns in a closed microchamber actuated by a surface acoustic wave (SAW) device. More complex and unique patterns require a sophisticated and dedicated SAW transducer. As a first, we demonstrate the generation of ring-shape particle patterns on-chip actuated by a simple generic SAW transducer. The ability to reshape unique acoustic field on-chip is realized by using a bulk micromachined microelectromechanical systems (MEMS) chip. We also show for the first time the creation of a two-dimensional (2D) pattern with just a one-dimensional (1D) standing SAW (SSAW). These results pave the way toward truly plug-and-play acoustofluidics, where unique patterns are defined by a diverse range of interchangeable chips on a standard SAW transducer.

Research Area(s)

  • Acoustofluidic devices, SAW devices, membrane structures, particle patterning, particle manipulation

Citation Format(s)

RECONFIGURABLE ACOUSTOFLUIDIC MANIPULATION OF PARTICLES IN RING-LIKE RICH PATTERNS ENABLED ON A BULK MICROMACHINED SILICON CHIP. / Qian, Jingui; Yang, Renhua; Begum, Habiba et al.
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). Institute of Electrical and Electronics Engineers, Inc., 2021. p. 365-368 (International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS).

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review