RECONFIGURABLE ACOUSTOFLUIDIC MANIPULATION OF PARTICLES IN RING-LIKE RICH PATTERNS ENABLED ON A BULK MICROMACHINED SILICON CHIP

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

Abstract

Acoustofluidic platforms typically enable only rectangular matrix-like of particle patterns in a closed microchamber actuated by a surface acoustic wave (SAW) device. More complex and unique patterns require a sophisticated and dedicated SAW transducer. As a first, we demonstrate the generation of ring-shape particle patterns on-chip actuated by a simple generic SAW transducer. The ability to reshape unique acoustic field on-chip is realized by using a bulk micromachined microelectromechanical systems (MEMS) chip. We also show for the first time the creation of a two-dimensional (2D) pattern with just a one-dimensional (1D) standing SAW (SSAW). These results pave the way toward truly plug-and-play acoustofluidics, where unique patterns are defined by a diverse range of interchangeable chips on a standard SAW transducer.
Original languageEnglish
Title of host publication2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
PublisherIEEE
Pages365-368
ISBN (Electronic)978-0-7381-2562-6, 978-1-6654-1267-4
ISBN (Print)978-1-6654-4845-1
DOIs
Publication statusPublished - Jun 2021
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021) - Virtual, Orlando, United States
Duration: 20 Jun 202125 Jun 2021
https://www.transducers2021.org/
https://www.transducers2021.org/program/Transducers2021_Program.pdf
https://ieeexplore.ieee.org/xpl/conhome/1000712/all-proceedings

Publication series

NameInternational Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS
ISSN (Print)2167-0013
ISSN (Electronic)2167-0021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021)
PlaceUnited States
CityOrlando
Period20/06/2125/06/21
Internet address

Research Keywords

  • Acoustofluidic devices
  • SAW devices
  • membrane structures
  • particle patterning
  • particle manipulation

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