Abstract
Due to the rapid growth of the internet and multi-media communication networks, there are urgent needs and tremendous commercial values in the development of optoelectronics integrated circuits (OEICs). This work reviews the recent developments and the prospect of silicon-based integrated optoelectronic circuits (Si-OEICs). The technological aspects of porous silicon and oxynitride devices for integrated optoelectronic applications are discussed. Some optoelectronic devices being realized with these technologies are described. Recent achievements indicate that the present constraints for using Si-based materials in optoelectronics are mainly technological rather than physical. Once these technological difficulties are resolved, the realization and applications of Si-OEICs will growth rapidly. © 2002 IEEE.
| Original language | English |
|---|---|
| Title of host publication | 2002 23rd International Conference on Microelectronics, MIEL 2002 - Proceedings |
| Publisher | IEEE Computer Society |
| Pages | 285-292 |
| Volume | 1 |
| ISBN (Print) | 0780372352, 9780780372351 |
| DOIs | |
| Publication status | Published - 2002 |
| Externally published | Yes |
| Event | 2002 23rd International Conference on Microelectronics, MIEL 2002 - Nis, Serbia Duration: 12 May 2002 → 15 May 2002 https://ieeexplore.ieee.org/xpl/conhome/7858/proceeding |
Publication series
| Name | |
|---|---|
| Volume | 1 |
Conference
| Conference | 2002 23rd International Conference on Microelectronics, MIEL 2002 |
|---|---|
| Place | Serbia |
| City | Nis |
| Period | 12/05/02 → 15/05/02 |
| Internet address |
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