Recent developments and applications of plasma immersion ion implantation

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

100
Ion Implantation Material Science
16
Semiconductor Mater... Material Science
16
Surface Treatment Material Science
16
Biomaterial Material Science
16
Insulation Material Science

Biochemistry, Genetics and Molecular Biology

100
Development Biochemistry, Genetics an...
100
Immersion Biochemistry, Genetics an...
100
Blood Plasma Biochemistry, Genetics an...
14
Energy Biochemistry, Genetics an...
14
Surface Property Biochemistry, Genetics an...
14
Processing Biochemistry, Genetics an...
14
Sample Biochemistry, Genetics an...
14
Dose Biochemistry, Genetics an...
14
Direct Current Biochemistry, Genetics an...

Earth and Planetary Sciences

100
Submerging Earth and Planetary Scien...
100
Ion Implantation Earth and Planetary Scien...
100
Utilization Earth and Planetary Scien...
16
Sample Earth and Planetary Scien...
16
Hydrogen Plasma Earth and Planetary Scien...
16
Trench Earth and Planetary Scien...
16
Alternatives Earth and Planetary Scien...
16
Contamination Earth and Planetary Scien...
16
Semiconductors Earth and Planetary Scien...
16
Direct Current Earth and Planetary Scien...
16
Technology Transfer Earth and Planetary Scien...
16
Plasma Process Earth and Planetary Scien...
16
Ion Earth and Planetary Scien...
16
Surface Treatment Earth and Planetary Scien...

Keyphrases

100
Plasma Immersion Io... Keyphrases
20
Semiconductors Keyphrases
20
Beamline Keyphrases
20
Hydrogen Plasma Keyphrases
20
Ion Dose Keyphrases
20
Ion Implantation Keyphrases
20
Direct-current Plas... Keyphrases
20
Shallow Junction Keyphrases
20
Ion Energy Keyphrases
20
Plasma Doping Keyphrases
20
Late Development Keyphrases
20
Insulating Material... Keyphrases
20
Junction Formation Keyphrases
20
Trench Doping Keyphrases
20
Potential Alternati... Keyphrases
20
Layer Transfer Keyphrases
20
Plasma Surface Modi... Keyphrases
20
Biomaterial Surface... Keyphrases
20
Uniform Control Keyphrases
20
Transfer Technology Keyphrases
20
Material Surface Mo... Keyphrases
20
Contamination Contr... Keyphrases
20
Specimen Preparatio... Keyphrases

INIS

100
ion implantation INIS
100
applications INIS
100
plasma INIS
14
semiconductor mater... INIS
14
control INIS
14
processing INIS
14
modifications INIS
14
hydrogen INIS
14
surfaces INIS
14
energy INIS
14
layers INIS
14
doses INIS
14
ions INIS
14
contamination INIS
14
direct current INIS
14
junctions INIS
14
technology transfer INIS
14
biological material... INIS

Physics

100
Utilization Physics
100
Ion Implantation Physics
100
Submerging Physics
100
Blood Plasma Physics
16
Transferring Physics
16
Ion Physics
16
Plasma Current Physics
16
Semiconductors Physics
16
Revision Physics
16
Hydrogen Plasma Physics
16
Technology Physics
16
Insulation Physics
16
Alternatives Physics
16
Plasma Process Physics
16
Beamline Physics
Research OutputsResearch Output authored by Recent developments and applications of plasma immersion ion implantation is tagged with the concept