Real-time spectroscopic ellipsometry from 1.5 to 6.5 eV

J. A. Zapien; R. W. Collins; R. Messier

doi:10.1016/S0040-6090(99)00916-5

Real-time spectroscopic ellipsometry from 1.5 to 6.5 eV

J. A. Zapien, R. W. Collins, R. Messier

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

11 Citations (Scopus)

Abstract

A rotating polarizer multichannel ellipsometer has been optimized for operation well into the ultraviolet (UV) spectral range. Key modifications to previous instrument designs include (i) a tandem in-line Xe/D₂ source configuration for usable spectral output from 1.5 (827 nm) to 6.5 eV (191 nm), (ii) MgF₂ Rochon polarizers for high transmission in the UV and (iii) a spectrograph with a grating blazed at 250 nm and two stages of internally-mounted order-sorting filters. The resulting multichannel ellipsometer provides 132 point spectra in the ellipsometric parameters (ψ, Δ) over the range from 1.5 to 6.5 eV with a minimum acquisition time of 24.5 ms. As an example of the application of this instrument, real-time spectroscopic ellipsometry (SE) is reported for the analysis of a hexagonal boron nitride thin film deposition by radio-frequency magnetron sputtering onto a silicon wafer substrate.

Original language	English
Pages (from-to)	16-21
Journal	Thin Solid Films
Volume	364
Issue number	1
DOIs	https://doi.org/10.1016/S0040-6090(99)00916-5
Publication status	Published - 27 Mar 2000
Externally published	Yes
Event	The 1999 E-MRS Spring Conference, Symposium P: Optical Characterization of Semiconductor Layers and Surfaces - Strasbourg, France Duration: 1 Jun 1999 → 4 Jun 1999

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title = "Real-time spectroscopic ellipsometry from 1.5 to 6.5 eV",

abstract = "A rotating polarizer multichannel ellipsometer has been optimized for operation well into the ultraviolet (UV) spectral range. Key modifications to previous instrument designs include (i) a tandem in-line Xe/D2 source configuration for usable spectral output from 1.5 (827 nm) to 6.5 eV (191 nm), (ii) MgF2 Rochon polarizers for high transmission in the UV and (iii) a spectrograph with a grating blazed at 250 nm and two stages of internally-mounted order-sorting filters. The resulting multichannel ellipsometer provides 132 point spectra in the ellipsometric parameters (ψ, Δ) over the range from 1.5 to 6.5 eV with a minimum acquisition time of 24.5 ms. As an example of the application of this instrument, real-time spectroscopic ellipsometry (SE) is reported for the analysis of a hexagonal boron nitride thin film deposition by radio-frequency magnetron sputtering onto a silicon wafer substrate.",

author = "Zapien, {J. A.} and Collins, {R. W.} and R. Messier",

year = "2000",

month = mar,

day = "27",

doi = "10.1016/S0040-6090(99)00916-5",

language = "English",

volume = "364",

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journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "1",

note = "The 1999 E-MRS Spring Conference, Symposium P: Optical Characterization of Semiconductor Layers and Surfaces ; Conference date: 01-06-1999 Through 04-06-1999",

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TY - JOUR

T1 - Real-time spectroscopic ellipsometry from 1.5 to 6.5 eV

AU - Zapien, J. A.

AU - Collins, R. W.

AU - Messier, R.

PY - 2000/3/27

Y1 - 2000/3/27

N2 - A rotating polarizer multichannel ellipsometer has been optimized for operation well into the ultraviolet (UV) spectral range. Key modifications to previous instrument designs include (i) a tandem in-line Xe/D2 source configuration for usable spectral output from 1.5 (827 nm) to 6.5 eV (191 nm), (ii) MgF2 Rochon polarizers for high transmission in the UV and (iii) a spectrograph with a grating blazed at 250 nm and two stages of internally-mounted order-sorting filters. The resulting multichannel ellipsometer provides 132 point spectra in the ellipsometric parameters (ψ, Δ) over the range from 1.5 to 6.5 eV with a minimum acquisition time of 24.5 ms. As an example of the application of this instrument, real-time spectroscopic ellipsometry (SE) is reported for the analysis of a hexagonal boron nitride thin film deposition by radio-frequency magnetron sputtering onto a silicon wafer substrate.

AB - A rotating polarizer multichannel ellipsometer has been optimized for operation well into the ultraviolet (UV) spectral range. Key modifications to previous instrument designs include (i) a tandem in-line Xe/D2 source configuration for usable spectral output from 1.5 (827 nm) to 6.5 eV (191 nm), (ii) MgF2 Rochon polarizers for high transmission in the UV and (iii) a spectrograph with a grating blazed at 250 nm and two stages of internally-mounted order-sorting filters. The resulting multichannel ellipsometer provides 132 point spectra in the ellipsometric parameters (ψ, Δ) over the range from 1.5 to 6.5 eV with a minimum acquisition time of 24.5 ms. As an example of the application of this instrument, real-time spectroscopic ellipsometry (SE) is reported for the analysis of a hexagonal boron nitride thin film deposition by radio-frequency magnetron sputtering onto a silicon wafer substrate.

UR - http://www.scopus.com/inward/record.url?scp=0033879324&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0033879324&origin=recordpage

U2 - 10.1016/S0040-6090(99)00916-5

DO - 10.1016/S0040-6090(99)00916-5

M3 - RGC 21 - Publication in refereed journal

SN - 0040-6090

VL - 364

SP - 16

EP - 21

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1

T2 - The 1999 E-MRS Spring Conference, Symposium P: Optical Characterization of Semiconductor Layers and Surfaces

Y2 - 1 June 1999 through 4 June 1999

ER -

Real-time spectroscopic ellipsometry from 1.5 to 6.5 eV

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