Real time measurement of surface roughness using laser technique

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review

2 Scopus Citations
View graph of relations

Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)6-10
Journal / PublicationQinghua Daxue Xuebao/Journal of Tsinghua University
Volume39
Issue number2
Publication statusPublished - Feb 1999
Externally publishedYes

Abstract

A discussion about recently developed methods for measuring the roughness of the dynamic surface in process has been taken. In order to overcome disadvantages of the present methods, a new technique using dark region ratio of the reflected laser to determine the dynamic surface roughness is proposed. The measuring range of surface roughness is from 0.05 μm to 1.6 μm or from 0.4 μm to 12.5 μm which is related to the reflected initial average optical intensity. The influence factors such as speed, initial optical intensity on the dark region ratio have been discussed. The measuring results are very close to these measured by Telyer-soft.

Citation Format(s)

Real time measurement of surface roughness using laser technique. / Luo, Jianbin; Wang, Wen; Wong, Patrick P L; Wen, Shizhu.

In: Qinghua Daxue Xuebao/Journal of Tsinghua University, Vol. 39, No. 2, 02.1999, p. 6-10.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review