Real time analysis of magnetron-sputtered thin-film CdTe by multichannel spectroscopic ellipsometry

Jian Li; Jie Chen; J. A. Zapien; N. J. Podraza; Chi Chen; J. Drayton; A. Vasko; A. Gupta; S. L. Wang; R. W. Collins; A. D. Compaan

doi:10.1557/proc-865-f1.2

Real time analysis of magnetron-sputtered thin-film CdTe by multichannel spectroscopic ellipsometry

Jian Li, Jie Chen, J. A. Zapien, N. J. Podraza, Chi Chen, J. Drayton, A. Vasko, A. Gupta, S. L. Wang, R. W. Collins, A. D. Compaan

City University of Hong Kong

Research output: Journal Publications and Reviews › RGC 22 - Publication in policy or professional journal

7 Citations (Scopus)

Abstract

Real time spectroscopic ellipsometry (RTSE) based on rotating-compensator modulation and multichannel detection has been implemented to characterize polycrystalline thin film CdTe deposition for photovoltaic applications. RTSE is capable of providing routine deposition information on substrate temperature T and deposition rate. It is also capable of providing detailed information on the thickness evolution of microstructure and optical properties. In this study, we highlight the differences in nucleation that occur under different CdTe deposition conditions on smooth crystalline Si wafer substrates. Differing behavior in the initial stages of deposition has been observed, ranging from layer-by-layer growth to nucleation and coalescence of 45 Å thick clusters. We also consider the thickness and substrate dependence of the microstructure, comparing depositions on smooth Si wafer and rough thin film Mo substrates. © 2005 Materials Research Society.

Original language	English
Article number	F1.2
Pages (from-to)	9-14
Journal	Materials Research Society Symposium Proceedings
Volume	865
DOIs	https://doi.org/10.1557/proc-865-f1.2
Publication status	Published - 2005
Event	2005 Materials Research Society Spring Meeting (2005 MRS Spring Meeting) - San Francisco, United States Duration: 28 Mar 2005 → 1 Apr 2005 https://catalog.princeton.edu/catalog/SCSB-5221693 https://www.mrs.org/docs/default-source/meetings-events/spring-meetings/meeting-abstracts-2000-2004/spring-2005-abstracts/abstracts-symposium-aa-dynamic-self-organizing-systems-in-multifunctional-nanomaterials-and-nanostructures.pdf?sfvrsn=bb5a7210_5 https://www.mrs.org/spring2005 http://assets.cambridge.org/97811074/08982/toc/9781107408982_toc.pdf

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title = "Real time analysis of magnetron-sputtered thin-film CdTe by multichannel spectroscopic ellipsometry",

abstract = "Real time spectroscopic ellipsometry (RTSE) based on rotating-compensator modulation and multichannel detection has been implemented to characterize polycrystalline thin film CdTe deposition for photovoltaic applications. RTSE is capable of providing routine deposition information on substrate temperature T and deposition rate. It is also capable of providing detailed information on the thickness evolution of microstructure and optical properties. In this study, we highlight the differences in nucleation that occur under different CdTe deposition conditions on smooth crystalline Si wafer substrates. Differing behavior in the initial stages of deposition has been observed, ranging from layer-by-layer growth to nucleation and coalescence of 45 {\AA} thick clusters. We also consider the thickness and substrate dependence of the microstructure, comparing depositions on smooth Si wafer and rough thin film Mo substrates. {\textcopyright} 2005 Materials Research Society.",

author = "Jian Li and Jie Chen and Zapien, {J. A.} and Podraza, {N. J.} and Chi Chen and J. Drayton and A. Vasko and A. Gupta and Wang, {S. L.} and Collins, {R. W.} and Compaan, {A. D.}",

year = "2005",

doi = "10.1557/proc-865-f1.2",

language = "English",

volume = "865",

pages = "9--14",

journal = "Materials Research Society Symposium Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "2005 Materials Research Society Spring Meeting (2005 MRS Spring Meeting) ; Conference date: 28-03-2005 Through 01-04-2005",

url = "https://catalog.princeton.edu/catalog/SCSB-5221693, https://www.mrs.org/docs/default-source/meetings-events/spring-meetings/meeting-abstracts-2000-2004/spring-2005-abstracts/abstracts-symposium-aa-dynamic-self-organizing-systems-in-multifunctional-nanomaterials-and-nanostructures.pdf?sfvrsn=bb5a7210_5, https://www.mrs.org/spring2005, http://assets.cambridge.org/97811074/08982/toc/9781107408982_toc.pdf",

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TY - JOUR

T1 - Real time analysis of magnetron-sputtered thin-film CdTe by multichannel spectroscopic ellipsometry

AU - Li, Jian

AU - Chen, Jie

AU - Zapien, J. A.

AU - Podraza, N. J.

AU - Chen, Chi

AU - Drayton, J.

AU - Vasko, A.

AU - Gupta, A.

AU - Wang, S. L.

AU - Collins, R. W.

AU - Compaan, A. D.

PY - 2005

Y1 - 2005

N2 - Real time spectroscopic ellipsometry (RTSE) based on rotating-compensator modulation and multichannel detection has been implemented to characterize polycrystalline thin film CdTe deposition for photovoltaic applications. RTSE is capable of providing routine deposition information on substrate temperature T and deposition rate. It is also capable of providing detailed information on the thickness evolution of microstructure and optical properties. In this study, we highlight the differences in nucleation that occur under different CdTe deposition conditions on smooth crystalline Si wafer substrates. Differing behavior in the initial stages of deposition has been observed, ranging from layer-by-layer growth to nucleation and coalescence of 45 Å thick clusters. We also consider the thickness and substrate dependence of the microstructure, comparing depositions on smooth Si wafer and rough thin film Mo substrates. © 2005 Materials Research Society.

AB - Real time spectroscopic ellipsometry (RTSE) based on rotating-compensator modulation and multichannel detection has been implemented to characterize polycrystalline thin film CdTe deposition for photovoltaic applications. RTSE is capable of providing routine deposition information on substrate temperature T and deposition rate. It is also capable of providing detailed information on the thickness evolution of microstructure and optical properties. In this study, we highlight the differences in nucleation that occur under different CdTe deposition conditions on smooth crystalline Si wafer substrates. Differing behavior in the initial stages of deposition has been observed, ranging from layer-by-layer growth to nucleation and coalescence of 45 Å thick clusters. We also consider the thickness and substrate dependence of the microstructure, comparing depositions on smooth Si wafer and rough thin film Mo substrates. © 2005 Materials Research Society.

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U2 - 10.1557/proc-865-f1.2

DO - 10.1557/proc-865-f1.2

M3 - RGC 22 - Publication in policy or professional journal

SN - 0272-9172

VL - 865

SP - 9

EP - 14

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

M1 - F1.2

T2 - 2005 Materials Research Society Spring Meeting (2005 MRS Spring Meeting)

Y2 - 28 March 2005 through 1 April 2005

ER -

Real time analysis of magnetron-sputtered thin-film CdTe by multichannel spectroscopic ellipsometry

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