Rapidly tunable and highly reversible bio-inspired dry adhesion for transfer printing in air and a vacuum

Changhong Linghu, Chengjun Wang, Nuo Cen, Jiaming Wu, Zhengfeng Lai, Jizhou Song

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

129 Citations (Scopus)

Abstract

Tunable and reversible dry adhesion has attracted much attention in academia and industry due to its wide applications ranging from releasable joints to stamps for transfer printing. Here, a simple yet robust magnetically actuated, aphid-inspired design of an elastomeric surface that provides rapidly tunable and highly reversible adhesion strength is reported. The magnetically actuated adhesive features open reservoirs filled with magnetic particles and encapsulated by a thin surface membrane, which can be deformed in a controlled manner via the magnetic field, thus, to tune the adhesion. The combination of the rate dependent effect and magnetic actuation of the thin surface membrane offers continuously tunable adhesion with a great switchability and a quick response. Experimental and theoretical studies reveal the underlying physics and provide design guidelines to optimize geometries for the broad control of adhesion. Demonstrations of this concept in stamps for transfer printing of silicon wafers in air and in a vacuum with a selective and programmable mode illustrate the capabilities for deterministic assembly and the potential in the semiconductor industry. © The Royal Society of Chemistry.
Original languageEnglish
Pages (from-to)30-37
JournalSoft Matter
Volume15
Issue number1
DOIs
Publication statusPublished - Jan 2019
Externally publishedYes

Bibliographical note

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Funding

This work was supported by the National Basic Research Program (Grant No. 2015CB351901), the Zhejiang Provincial Natural Science Foundation of China (Grant No. LR15A020001), the National Natural Science Foundation of China (Grant No. 11872331, 11372272, 11622221 and 11621062), the Shenzhen Science and Technology Program (Grant No. JCY20170816172454095), and the Fundamental Research Funds for the Central Universities.

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