TY - GEN
T1 - Rapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies
AU - Li, Wen J.
AU - Xi, Ning
PY - 2006
Y1 - 2006
N2 - Our team has developed a systematic process to rapidly construct Carbon Nanotube (CNT) sensors by combining DEP and micro-robotics technologies. Arrays of CNT sensors were fabricated on MUMPs chips using this systematic process and the CNT sensor characteristics were found to be very consistent with individual CNT sensors fabricated using basic manual DEP manipulation process. We have shown that the average time to fabricate CNT sensor using this process is ∼1 sec, which means that potentially 100,000 CNT components could be built in 24 hours. CNT Sensors, DEP Manipulation, Micro-robotics, Nano-sensor Arrays.
AB - Our team has developed a systematic process to rapidly construct Carbon Nanotube (CNT) sensors by combining DEP and micro-robotics technologies. Arrays of CNT sensors were fabricated on MUMPs chips using this systematic process and the CNT sensor characteristics were found to be very consistent with individual CNT sensors fabricated using basic manual DEP manipulation process. We have shown that the average time to fabricate CNT sensor using this process is ∼1 sec, which means that potentially 100,000 CNT components could be built in 24 hours. CNT Sensors, DEP Manipulation, Micro-robotics, Nano-sensor Arrays.
UR - https://www.scopus.com/pages/publications/50249148918
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-50249148918&origin=recordpage
U2 - 10.1109/NMDC.2006.4388707
DO - 10.1109/NMDC.2006.4388707
M3 - RGC 32 - Refereed conference paper (with host publication)
SN - 1424405408
SN - 9781424405404
VL - 1
SP - 108
EP - 109
BT - 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC
T2 - 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC
Y2 - 22 October 2006 through 25 October 2006
ER -