Raman spectra of diamond-like carbon films deposited by vacuum cathodic arc

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

3 Scopus Citations
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Author(s)

  • Liuhe Li
  • Yongqin Wu
  • Xuming Cui
  • Haiquan Zhang
  • ZhangYanhua
  • Lifang Xia

Detail(s)

Original languageEnglish
Pages (from-to)220-224
Journal / PublicationJinshu Xuebao/Acta Metallurgica Sinica
Volume40
Issue number2
Publication statusPublished - Feb 2004

Abstract

The structures of diamond-like carbon (DLC) films deposited by vacuum arc evaporation with and without curve arc magnetic filter are studied and compared using Raman shifts. The Raman shifts are deconvolved into D peak and G peak with Gaussian-Lorentzion fitness. The effects of the deposition parameters such as bias voltage and bias current strength of curved magnetic fields on the DLC films structures are discussed. The results show that Ar gas pressure has not obvious effect on the formation of the DLC film; moderate bias current increases the sp3 content; the sp2 cluster can be increased for a too high substrate bias. The magnetic curved filter not only can remove the carbon macroparticles, but also can improve the sp3 content.

Research Area(s)

  • Bias current, Curved arc magnetic filter, Diamond-like carbon film, Raman spectrum

Citation Format(s)

Raman spectra of diamond-like carbon films deposited by vacuum cathodic arc. / Li, Liuhe; Wu, Yongqin; Cui, Xuming et al.
In: Jinshu Xuebao/Acta Metallurgica Sinica, Vol. 40, No. 2, 02.2004, p. 220-224.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review