Quantification of SurfaceSIMS Data: The Influence of Oxygen-Flooding on Secondary Ion Yields during SIMS Analysis of Silicon

Stephen P. Smith; Paul K. Chu

Quantification of SurfaceSIMS Data: The Influence of Oxygen-Flooding on Secondary Ion Yields during SIMS Analysis of Silicon

Stephen P. Smith, Paul K. Chu

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Pages	203
Publication status	Published - Sept 1997
Externally published	Yes
Event	11th International Conference on Second Ion Mass Spectrometry - Hilton Hotel, Walt Disney World, Orlando, United States Duration: 7 Sept 1997 → 12 Sept 1997

Conference

Conference	11th International Conference on Second Ion Mass Spectrometry
Abbreviated title	SIMS XI
Country/Territory	United States
City	Orlando
Period	7/09/97 → 12/09/97

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Publication information for this record has been verified with the author(s) concerned.

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title = "Quantification of SurfaceSIMS Data: The Influence of Oxygen-Flooding on Secondary Ion Yields during SIMS Analysis of Silicon",

author = "Smith, {Stephen P.} and Chu, {Paul K.}",

note = "Publication information for this record has been verified with the author(s) concerned. ; 11th International Conference on Second Ion Mass Spectrometry, SIMS XI ; Conference date: 07-09-1997 Through 12-09-1997",

year = "1997",

month = sep,

language = "English",

pages = "203",

}

Quantification of SurfaceSIMS Data: The Influence of Oxygen-Flooding on Secondary Ion Yields during SIMS Analysis of Silicon. / Smith, Stephen P.; Chu, Paul K.
1997. 203 Paper presented at 11th International Conference on Second Ion Mass Spectrometry, Orlando, Florida, United States.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Quantification of SurfaceSIMS Data

T2 - 11th International Conference on Second Ion Mass Spectrometry

AU - Smith, Stephen P.

AU - Chu, Paul K.

N1 - Publication information for this record has been verified with the author(s) concerned.

PY - 1997/9

Y1 - 1997/9

M3 - RGC 32 - Refereed conference paper (without host publication)

SP - 203

Y2 - 7 September 1997 through 12 September 1997

ER -