@article{7bb1b11710aa4743b6578d4aa5e7db5f,
title = "Quantification of Interfacial Roughness of In2O3/ZrO2 Superlattice Films in 3D ",
author = "Zhong, \{X. Y.\} and B. Kabius and Schreiber, \{D. K.\} and Eastman, \{J. A.\} and Fong, \{D. D.\} and Petford-Long, \{A. K.\}",
year = "2009",
month = jul,
doi = "10.1017/S1431927609098626",
language = "English",
volume = "15",
pages = "600--601",
journal = "Microscopy and Microanalysis",
issn = "1431-9276",
publisher = "Oxford University Press",
number = "Supplement S2",
}