QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES

Muhammad Wajih Ullah Siddiqi; Joshua E.-Y. Lee

doi:10.1109/TRANSDUCERS.2019.8808202

QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES

Muhammad Wajih Ullah Siddiqi
, Joshua E.-Y. Lee^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

5 Citations (Scopus)

Abstract

This paper describes the novel use of a hybrid phononic crystal (PnC) array formed by two PnC shapes on anchoring boundaries of a 7^thharmonic Lamb wave aluminum nitride on silicon (AlN-on-Si) resonator. We demonstrate the effect of the hybrid PnC in boosting Q to the order 10⁴. The hybrid PnC array comprises a disk PnC with a wide acoustic bandgap (ABG) and a ring PnC as an intermediary routing layer for input/output (I/O) electrical feeds to more effectively reduce anchor loss. We show that the wide ABG disk PnC provides 47dB of acoustic attenuation in a Lamb wave delay line.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Proceedings
Publisher	IEEE
Pages	913-916
ISBN (Electronic)	978-1-5386-8104-6
ISBN (Print)	978-1-7281-2007-2
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808202
Publication status	Published - Jun 2019
Event	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Estrel Congress Center, Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019 https://www.transducersconferences.org/archive/transducers2019/

Publication series

Name	International Conference on Solid State Sensors and Actuators (TRANSDUCERS)
Publisher	IEEE
ISSN (Print)	2167-0013
ISSN (Electronic)	2167-0021

Conference

Conference	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Place	Germany
City	Berlin
Period	23/06/19 → 27/06/19
Internet address	https://www.transducersconferences.org/archive/transducers2019/

Research Keywords

Microelectromechanical Systems
piezoelectric-on-silicon resonators
anchor loss
phononic crystals
acoustic bandgap
quality factor

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10.1109/TRANSDUCERS.2019.8808202

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Cite this

Siddiqi, M. W. U., & Lee, J. E.-Y. (2019). QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Proceedings (pp. 913-916). Article W3P.007 (International Conference on Solid State Sensors and Actuators (TRANSDUCERS)). IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808202

Siddiqi, Muhammad Wajih Ullah ; Lee, Joshua E.-Y. / QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Proceedings. IEEE, 2019. pp. 913-916 (International Conference on Solid State Sensors and Actuators (TRANSDUCERS)).

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title = "QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES",

abstract = "This paper describes the novel use of a hybrid phononic crystal (PnC) array formed by two PnC shapes on anchoring boundaries of a 7th harmonic Lamb wave aluminum nitride on silicon (AlN-on-Si) resonator. We demonstrate the effect of the hybrid PnC in boosting Q to the order 104. The hybrid PnC array comprises a disk PnC with a wide acoustic bandgap (ABG) and a ring PnC as an intermediary routing layer for input/output (I/O) electrical feeds to more effectively reduce anchor loss. We show that the wide ABG disk PnC provides 47dB of acoustic attenuation in a Lamb wave delay line. ",

keywords = "Microelectromechanical Systems, piezoelectric-on-silicon resonators, anchor loss, phononic crystals, acoustic bandgap, quality factor",

author = "Siddiqi, \{Muhammad Wajih Ullah\} and Lee, \{Joshua E.-Y.\}",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808202",

language = "English",

isbn = "978-1-7281-2007-2",

series = "International Conference on Solid State Sensors and Actuators (TRANSDUCERS)",

publisher = "IEEE",

pages = "913--916",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems \& Eurosensors XXXIII (TRANSDUCERS \& EUROSENSORS XXXIII) Proceedings",

address = "United States",

note = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems \& Eurosensors XXXIII (TRANSDUCERS \& EUROSENSORS XXXIII) ; Conference date: 23-06-2019 Through 27-06-2019",

url = "https://www.transducersconferences.org/archive/transducers2019/",

}

Siddiqi, MWU & Lee, JE-Y 2019, QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Proceedings., W3P.007, International Conference on Solid State Sensors and Actuators (TRANSDUCERS), IEEE, pp. 913-916, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808202

QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES. / Siddiqi, Muhammad Wajih Ullah ; Lee, Joshua E.-Y.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Proceedings. IEEE, 2019. p. 913-916 W3P.007 (International Conference on Solid State Sensors and Actuators (TRANSDUCERS)).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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T1 - QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES

AU - Siddiqi, Muhammad Wajih Ullah

AU - Lee, Joshua E.-Y.

PY - 2019/6

Y1 - 2019/6

N2 - This paper describes the novel use of a hybrid phononic crystal (PnC) array formed by two PnC shapes on anchoring boundaries of a 7th harmonic Lamb wave aluminum nitride on silicon (AlN-on-Si) resonator. We demonstrate the effect of the hybrid PnC in boosting Q to the order 104. The hybrid PnC array comprises a disk PnC with a wide acoustic bandgap (ABG) and a ring PnC as an intermediary routing layer for input/output (I/O) electrical feeds to more effectively reduce anchor loss. We show that the wide ABG disk PnC provides 47dB of acoustic attenuation in a Lamb wave delay line.

AB - This paper describes the novel use of a hybrid phononic crystal (PnC) array formed by two PnC shapes on anchoring boundaries of a 7th harmonic Lamb wave aluminum nitride on silicon (AlN-on-Si) resonator. We demonstrate the effect of the hybrid PnC in boosting Q to the order 104. The hybrid PnC array comprises a disk PnC with a wide acoustic bandgap (ABG) and a ring PnC as an intermediary routing layer for input/output (I/O) electrical feeds to more effectively reduce anchor loss. We show that the wide ABG disk PnC provides 47dB of acoustic attenuation in a Lamb wave delay line.

KW - Microelectromechanical Systems

KW - piezoelectric-on-silicon resonators

KW - anchor loss

KW - phononic crystals

KW - acoustic bandgap

KW - quality factor

UR - https://www.scopus.com/pages/publications/85071945729

UR - https://www.scopus.com/pages/publications/85071945729#tab=impact

U2 - 10.1109/TRANSDUCERS.2019.8808202

DO - 10.1109/TRANSDUCERS.2019.8808202

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 978-1-7281-2007-2

T3 - International Conference on Solid State Sensors and Actuators (TRANSDUCERS)

SP - 913

EP - 916

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Proceedings

PB - IEEE

T2 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Y2 - 23 June 2019 through 27 June 2019

ER -

Siddiqi MWU , Lee JEY. QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Proceedings. IEEE. 2019. p. 913-916. W3P.007. (International Conference on Solid State Sensors and Actuators (TRANSDUCERS)). doi: 10.1109/TRANSDUCERS.2019.8808202

QUALITY FACTOR ENHANCEMENT OF ALN-ON-SI LAMB WAVE RESONATORS USING A HYBRID OF PHONONIC CRYSTAL SHAPES IN ANCHORING BOUNDARIES

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